Micromachined slider suspension with integrated friction force sensors for tribological research on rigid disk storage media

G.J. Burger, Johannes Faas Burger, Theodorus S.J. Lammerink, J.H.J. Fluitman, S. Imai

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceeding of STLE Tribology conference
    Place of PublicationOrlando, USA
    Number of pages2
    Publication statusPublished - 8 Oct 1995


    • METIS-114129

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