Micromachined slider suspension with integrated friction force sensors for tribological research on rigid disk storage media

G.J. Burger, Johannes Faas Burger, Theodorus S.J. Lammerink, J.H.J. Fluitman, S. Imai

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationOrlando, USA
    Publication statusPublished - 8 Oct 1995

    Keywords

    • METIS-114941

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