Micromachined structures for thermal measurements of fluid and flow parameters

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Abstract

In this paper thermal sensor-actuator structures are proposed that can be used to measure various fluid parameters such as thermal conductivity, flow velocity, heat capacity, kinematic viscosity and pressure. All structures are designed in such a way that they can be realized in the same fabrication process and therefore they can be easily combined in a single device. All structures are based on the principle of thermal measurements: resistive structures are used for both heating and temperature measurements. For accurate measurements the temperature coefficient of resistance (TCR) must be well known. Therefore, a special structure, which can be used for auto-calibration, was designed to measure the TCR. A first device containing structures for the combined measurement of flow velocity, thermal conductivity and TCR has been fabricated. Measurements show promising results.
Original languageUndefined
Pages (from-to)311-318
Number of pages8
JournalJournal of micromechanics and microengineering
Volume11
Issue number4
DOIs
Publication statusPublished - Jul 2001

Keywords

  • EWI-12862
  • IR-42370
  • METIS-201187

Cite this

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title = "Micromachined structures for thermal measurements of fluid and flow parameters",
abstract = "In this paper thermal sensor-actuator structures are proposed that can be used to measure various fluid parameters such as thermal conductivity, flow velocity, heat capacity, kinematic viscosity and pressure. All structures are designed in such a way that they can be realized in the same fabrication process and therefore they can be easily combined in a single device. All structures are based on the principle of thermal measurements: resistive structures are used for both heating and temperature measurements. For accurate measurements the temperature coefficient of resistance (TCR) must be well known. Therefore, a special structure, which can be used for auto-calibration, was designed to measure the TCR. A first device containing structures for the combined measurement of flow velocity, thermal conductivity and TCR has been fabricated. Measurements show promising results.",
keywords = "EWI-12862, IR-42370, METIS-201187",
author = "{van Baar}, J.J.J. and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",
year = "2001",
month = "7",
doi = "10.1088/0960-1317/11/4/304",
language = "Undefined",
volume = "11",
pages = "311--318",
journal = "Journal of micromechanics and microengineering",
issn = "0960-1317",
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TY - JOUR

T1 - Micromachined structures for thermal measurements of fluid and flow parameters

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2001/7

Y1 - 2001/7

N2 - In this paper thermal sensor-actuator structures are proposed that can be used to measure various fluid parameters such as thermal conductivity, flow velocity, heat capacity, kinematic viscosity and pressure. All structures are designed in such a way that they can be realized in the same fabrication process and therefore they can be easily combined in a single device. All structures are based on the principle of thermal measurements: resistive structures are used for both heating and temperature measurements. For accurate measurements the temperature coefficient of resistance (TCR) must be well known. Therefore, a special structure, which can be used for auto-calibration, was designed to measure the TCR. A first device containing structures for the combined measurement of flow velocity, thermal conductivity and TCR has been fabricated. Measurements show promising results.

AB - In this paper thermal sensor-actuator structures are proposed that can be used to measure various fluid parameters such as thermal conductivity, flow velocity, heat capacity, kinematic viscosity and pressure. All structures are designed in such a way that they can be realized in the same fabrication process and therefore they can be easily combined in a single device. All structures are based on the principle of thermal measurements: resistive structures are used for both heating and temperature measurements. For accurate measurements the temperature coefficient of resistance (TCR) must be well known. Therefore, a special structure, which can be used for auto-calibration, was designed to measure the TCR. A first device containing structures for the combined measurement of flow velocity, thermal conductivity and TCR has been fabricated. Measurements show promising results.

KW - EWI-12862

KW - IR-42370

KW - METIS-201187

U2 - 10.1088/0960-1317/11/4/304

DO - 10.1088/0960-1317/11/4/304

M3 - Article

VL - 11

SP - 311

EP - 318

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

SN - 0960-1317

IS - 4

ER -