Micromachined two dimensional resistor arrays for determination of gas parameters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

7 Citations (Scopus)
3 Downloads (Pure)

Abstract

A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of measuring temperature distributions are the inherent compensation of heat losses to the support and the insensitivity to variations in the temperature coefficient of resistance.
Original languageEnglish
Title of host publicationTRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Place of PublicationLos Alamitos
PublisherIEEE
Pages1606-1609
Number of pages4
ISBN (Print)0-7803-7731-1
DOIs
Publication statusPublished - Jun 2003
Event12th International Conference on Solid State Sensors, Actuators and Microsystems - Boston Marriott Copley Place, Boston, United States
Duration: 8 Jun 200312 Jun 2003
Conference number: 12
http://www.transducersconferences.org/archive/transducers2003/

Publication series

Name
PublisherIEEE
Volume2

Conference

Conference12th International Conference on Solid State Sensors, Actuators and Microsystems
Abbreviated titleTRANSDUCERS 2003
CountryUnited States
CityBoston
Period8/06/0312/06/03
OtherJune 8-12, 2003
Internet address

Fingerprint

resistors
temperature distribution
gases
channel flow
thermal conductivity
diffusion coefficient
flow velocity
viscosity
heat
fluids
sensitivity
sensors
coefficients
temperature

Keywords

  • METIS-215241
  • EWI-11158
  • IR-46521

Cite this

van Baar, J. J. J., Verwey, W. B., Dijkstra, M., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J., ... Elwenspoek, M. C. (2003). Micromachined two dimensional resistor arrays for determination of gas parameters. In TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 (pp. 1606-1609). Los Alamitos: IEEE. https://doi.org/10.1109/SENSOR.2003.1217088
van Baar, J.J.J. ; Verwey, Willem B. ; Dijkstra, Mindert ; Dijkstra, Marcel ; Wiegerink, Remco J. ; Lammerink, Theodorus S.J. ; Krijnen, Gijsbertus J.M. ; Elwenspoek, Michael Curt. / Micromachined two dimensional resistor arrays for determination of gas parameters. TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. Los Alamitos : IEEE, 2003. pp. 1606-1609
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title = "Micromachined two dimensional resistor arrays for determination of gas parameters",
abstract = "A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of measuring temperature distributions are the inherent compensation of heat losses to the support and the insensitivity to variations in the temperature coefficient of resistance.",
keywords = "METIS-215241, EWI-11158, IR-46521",
author = "{van Baar}, J.J.J. and Verwey, {Willem B.} and Mindert Dijkstra and Marcel Dijkstra and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",
year = "2003",
month = "6",
doi = "10.1109/SENSOR.2003.1217088",
language = "English",
isbn = "0-7803-7731-1",
publisher = "IEEE",
pages = "1606--1609",
booktitle = "TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003",
address = "United States",

}

van Baar, JJJ, Verwey, WB, Dijkstra, M, Dijkstra, M, Wiegerink, RJ, Lammerink, TSJ, Krijnen, GJM & Elwenspoek, MC 2003, Micromachined two dimensional resistor arrays for determination of gas parameters. in TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. IEEE, Los Alamitos, pp. 1606-1609, 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, United States, 8/06/03. https://doi.org/10.1109/SENSOR.2003.1217088

Micromachined two dimensional resistor arrays for determination of gas parameters. / van Baar, J.J.J.; Verwey, Willem B.; Dijkstra, Mindert; Dijkstra, Marcel; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt.

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. Los Alamitos : IEEE, 2003. p. 1606-1609.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Micromachined two dimensional resistor arrays for determination of gas parameters

AU - van Baar, J.J.J.

AU - Verwey, Willem B.

AU - Dijkstra, Mindert

AU - Dijkstra, Marcel

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2003/6

Y1 - 2003/6

N2 - A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of measuring temperature distributions are the inherent compensation of heat losses to the support and the insensitivity to variations in the temperature coefficient of resistance.

AB - A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of measuring temperature distributions are the inherent compensation of heat losses to the support and the insensitivity to variations in the temperature coefficient of resistance.

KW - METIS-215241

KW - EWI-11158

KW - IR-46521

U2 - 10.1109/SENSOR.2003.1217088

DO - 10.1109/SENSOR.2003.1217088

M3 - Conference contribution

SN - 0-7803-7731-1

SP - 1606

EP - 1609

BT - TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

PB - IEEE

CY - Los Alamitos

ER -

van Baar JJJ, Verwey WB, Dijkstra M, Dijkstra M, Wiegerink RJ, Lammerink TSJ et al. Micromachined two dimensional resistor arrays for determination of gas parameters. In TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. Los Alamitos: IEEE. 2003. p. 1606-1609 https://doi.org/10.1109/SENSOR.2003.1217088