Micromachined two dimensional resistor arrays for determination of gas parameters

J.J.J. van Baar, Willem B. Verwey, Mindert Dijkstra, Marcel Dijkstra, Remco J. Wiegerink, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

7 Citations (Scopus)
5 Downloads (Pure)

Abstract

A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of measuring temperature distributions are the inherent compensation of heat losses to the support and the insensitivity to variations in the temperature coefficient of resistance.
Original languageEnglish
Title of host publicationTRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Place of PublicationLos Alamitos
PublisherIEEE
Pages1606-1609
Number of pages4
ISBN (Print)0-7803-7731-1
DOIs
Publication statusPublished - Jun 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Boston, United States
Duration: 8 Jun 200312 Jun 2003
Conference number: 12

Publication series

Name
PublisherIEEE
Volume2

Conference

Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003
Abbreviated titleTRANSDUCERS 2003
CountryUnited States
CityBoston
Period8/06/0312/06/03

Keywords

  • METIS-215241
  • EWI-11158
  • IR-46521

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  • Cite this

    van Baar, J. J. J., Verwey, W. B., Dijkstra, M., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J., ... Elwenspoek, M. C. (2003). Micromachined two dimensional resistor arrays for determination of gas parameters. In TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 (pp. 1606-1609). Los Alamitos: IEEE. https://doi.org/10.1109/SENSOR.2003.1217088