Micromaching techniques for a subminiature silicon condenser microphone

P.R. Scheeper, Wouter Olthuis, Piet Bergveld

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Pages-
    Publication statusPublished - 14 Jun 1991
    EventMESA Dag 1991 - Enschede, Netherlands
    Duration: 14 Jun 199114 Jun 1991

    Conference

    ConferenceMESA Dag 1991
    Country/TerritoryNetherlands
    CityEnschede
    Period14/06/9114/06/91
    Other(MESA Day/Meeting)

    Keywords

    • METIS-118153

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