Micromaching techniques for a subminiature silicon condenser microphone

P.R. Scheeper, Wouter Olthuis, Piet Bergveld

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 19 Nov 1991
Event	FOM-dagen 1991: Stroming & Warmte - Veldhoven, Netherlands Duration: 17 Jan 1991 → 19 Jan 1991

Keywords

@conference{ab2189912a144f689778e3bebf8d4c33,

title = "Micromaching techniques for a subminiature silicon condenser microphone",

keywords = "METIS-118165",

author = "P.R. Scheeper and Wouter Olthuis and Piet Bergveld",

year = "1991",

month = nov,

day = "19",

language = "English",

pages = "--",

note = "FOM-dagen 1991 : Stroming & Warmte ; Conference date: 17-01-1991 Through 19-01-1991",

}