Micromaching techniques for a subminiature silicon condenser microphone

P.R. Scheeper, Wouter Olthuis, Piet Bergveld

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Pages-
    Publication statusPublished - 19 Nov 1991
    EventFOM-dagen 1991: Stroming & Warmte - Veldhoven, Netherlands
    Duration: 17 Jan 199119 Jan 1991

    Conference

    ConferenceFOM-dagen 1991
    CountryNetherlands
    CityVeldhoven
    Period17/01/9119/01/91

    Keywords

    • METIS-118165

    Cite this

    Scheeper, P. R., Olthuis, W., & Bergveld, P. (1991). Micromaching techniques for a subminiature silicon condenser microphone. -. Poster session presented at FOM-dagen 1991, Veldhoven, Netherlands.