Micromachining of {111} plates in [001] oriented silicon

Johan W. Berenschot, R.E. Oosterbroek, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Other contribution › Other research output

    22 Citations (Scopus)
    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 23 Jun 1998

    Keywords

    • METIS-130808

    Cite this

    Berenschot, Johan W. ; Oosterbroek, R.E. ; Lammerink, Theodorus S.J. ; Elwenspoek, Michael Curt. / Micromachining of {111} plates in [001] oriented silicon. 1998. Enschede.
    @misc{cf3a03ab4038468ca11d40dd42869ce9,
    title = "Micromachining of {111} plates in [001] oriented silicon",
    keywords = "METIS-130808",
    author = "Berenschot, {Johan W.} and R.E. Oosterbroek and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",
    year = "1998",
    month = "6",
    day = "23",
    language = "Undefined",
    type = "Other",

    }

    Berenschot, JW, Oosterbroek, RE, Lammerink, TSJ & Elwenspoek, MC 1998, Micromachining of {111} plates in [001] oriented silicon. Enschede.

    Micromachining of {111} plates in [001] oriented silicon. / Berenschot, Johan W.; Oosterbroek, R.E.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.

    Enschede. 1998, .

    Research output: Other contribution › Other research output

    TY - GEN

    T1 - Micromachining of {111} plates in [001] oriented silicon

    AU - Berenschot, Johan W.

    AU - Oosterbroek, R.E.

    AU - Lammerink, Theodorus S.J.

    AU - Elwenspoek, Michael Curt

    PY - 1998/6/23

    Y1 - 1998/6/23

    KW - METIS-130808

    M3 - Other contribution

    CY - Enschede

    ER -

    Berenschot JW, Oosterbroek RE, Lammerink TSJ, Elwenspoek MC. Micromachining of {111} plates in [001] oriented silicon. 1998.