Micromachining of {111} plates in [001] oriented silicon

Johan W. Berenschot, R.E. Oosterbroek, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    22 Citations (Scopus)
    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 23 Jun 1998

    Keywords

    • METIS-130808

    Cite this

    Berenschot, J. W., Oosterbroek, R. E., Lammerink, T. S. J., & Elwenspoek, M. C. (1998, Jun 23). Micromachining of {111} plates in [001] oriented silicon. Enschede.