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Micromachining of buried micro channels in silicon
Meint J. de Boer, Willem Tjerkstra, J. W. (Erwin) Berenschot, Henri V. Jansen, G.J. Burger, J.G.E. (Han) Gardeniers, Miko Elwenspoek, Albert van den Berg
Research output: Contribution to journal › Article › Academic › peer-review
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