Micromachining of electret materials, advantages and possibilities

J.A. Voorthuyzen; Piet Bergveld

doi:10.1109/ISE.1988.38633

Micromachining of electret materials, advantages and possibilities

J.A. Voorthuyzen, Piet Bergveld

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Abstract

A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively. The advantages of micromachining electrets in such a way are numerous. Miniature sensors like microphones and pressure sensors, containing local areas using Teflon, have been realized in the authors' laboratories. The process can also be used for electret research. An example is the overall reduction of electret film thickness, by which the authors have determined the average penetration depth of accelerated electrons in Teflon FEP

Original language	English
Pages	582-586
DOIs	https://doi.org/10.1109/ISE.1988.38633
Publication status	Published - 1988
Event	6th International Symposium on Electrets, ISE 1988 - Oxford, United Kingdom Duration: 1 Sept 1988 → 3 Sept 1988 Conference number: 6

Conference

Conference	6th International Symposium on Electrets, ISE 1988
Abbreviated title	ISE
Country/Territory	United Kingdom
City	Oxford
Period	1/09/88 → 3/09/88

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10.1109/ISE.1988.38633

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title = "Micromachining of electret materials, advantages and possibilities",

abstract = "A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively. The advantages of micromachining electrets in such a way are numerous. Miniature sensors like microphones and pressure sensors, containing local areas using Teflon, have been realized in the authors' laboratories. The process can also be used for electret research. An example is the overall reduction of electret film thickness, by which the authors have determined the average penetration depth of accelerated electrons in Teflon FEP",

author = "J.A. Voorthuyzen and Piet Bergveld",

year = "1988",

doi = "10.1109/ISE.1988.38633",

language = "English",

pages = "582--586",

note = "6th International Symposium on Electrets, ISE 1988, ISE ; Conference date: 01-09-1988 Through 03-09-1988",

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T1 - Micromachining of electret materials, advantages and possibilities

AU - Voorthuyzen, J.A.

AU - Bergveld, Piet

N1 - Conference code: 6

PY - 1988

Y1 - 1988

N2 - A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively. The advantages of micromachining electrets in such a way are numerous. Miniature sensors like microphones and pressure sensors, containing local areas using Teflon, have been realized in the authors' laboratories. The process can also be used for electret research. An example is the overall reduction of electret film thickness, by which the authors have determined the average penetration depth of accelerated electrons in Teflon FEP

AB - A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively. The advantages of micromachining electrets in such a way are numerous. Miniature sensors like microphones and pressure sensors, containing local areas using Teflon, have been realized in the authors' laboratories. The process can also be used for electret research. An example is the overall reduction of electret film thickness, by which the authors have determined the average penetration depth of accelerated electrons in Teflon FEP

U2 - 10.1109/ISE.1988.38633

DO - 10.1109/ISE.1988.38633

M3 - Paper

SP - 582

EP - 586

T2 - 6th International Symposium on Electrets, ISE 1988

Y2 - 1 September 1988 through 3 September 1988

ER -

Micromachining of electret materials, advantages and possibilities

Abstract

Conference

UN SDGs

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