Micromachining of electret materials, advantages and possibilities

J.A. Voorthuyzen, Piet Bergveld

    Research output: Contribution to conferencePaper

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    Abstract

    A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively. The advantages of micromachining electrets in such a way are numerous. Miniature sensors like microphones and pressure sensors, containing local areas using Teflon, have been realized in the authors' laboratories. The process can also be used for electret research. An example is the overall reduction of electret film thickness, by which the authors have determined the average penetration depth of accelerated electrons in Teflon FEP
    Original languageEnglish
    Pages582-586
    DOIs
    Publication statusPublished - 1988
    Event6th International Symposium on Electrets, ISE 1988 - Oxford, United Kingdom
    Duration: 1 Sep 19883 Sep 1988
    Conference number: 6

    Conference

    Conference6th International Symposium on Electrets, ISE 1988
    Abbreviated titleISE
    CountryUnited Kingdom
    CityOxford
    Period1/09/883/09/88

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