Micromachining of high-contrast optical waveguides in silicon wafers

G. Pandraud, G.J. Veldhuis, Johan W. Berenschot, A.J. Nijdam, Hugo Hoekstra, O. Parriaux, Paul Lambeck

    Research output: Contribution to journalArticleAcademicpeer-review

    17 Citations (Scopus)
    6 Downloads (Pure)


    A fabrication technique by KOH etching for very thin free standing plane parallel silicon bridges in a <111> silicon wafer is presented. The applications of such a stress free slab as an evanescent optical waveguide sensor of unusually high sensitivity are discussed.
    Original languageEnglish
    Pages (from-to)308-310
    Number of pages3
    JournalIEEE photonics technology letters
    Issue number3
    Publication statusPublished - 2000


    • METIS-112088
    • IR-97949


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