Abstract
A fabrication technique by KOH etching for very thin free standing plane parallel silicon bridges in a <111> silicon wafer is presented. The applications of such a stress free slab as an evanescent optical waveguide sensor of unusually high sensitivity are discussed.
Original language | English |
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Pages (from-to) | 308-310 |
Number of pages | 3 |
Journal | IEEE photonics technology letters |
Volume | 12 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2000 |
Keywords
- METIS-112088
- IR-97949