Micromachining of planes in oriented silicon

Johan W. Berenschot, R.E. Oosterbroek, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the MME Conference 1997
    Place of PublicationSouthampton
    Pages83-86
    Publication statusPublished - 31 Aug 1997

    Keywords

    • METIS-130225

    Cite this

    Berenschot, J. W., Oosterbroek, R. E., Lammerink, T. S. J., & Elwenspoek, M. C. (1997). Micromachining of planes in oriented silicon. In Proceedings of the MME Conference 1997 (pp. 83-86). Southampton.