Micromachining of planes in oriented silicon

Johan W. Berenschot, R.E. Oosterbroek, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the MME Conference 1997
Place of Publication	Southampton
Pages	83-86
Publication status	Published - 31 Aug 1997

Keywords

This output contributes to the following UN Sustainable Development Goals (SDGs)

@inproceedings{3273f1543779494b8ae6f7d36f6f3a80,

title = "Micromachining of planes in oriented silicon",

keywords = "METIS-130225",

author = "Berenschot, {Johan W.} and R.E. Oosterbroek and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "1997",

month = aug,

day = "31",

language = "Undefined",

pages = "83--86",

booktitle = "Proceedings of the MME Conference 1997",

}