Micromachining of planes in oriented silicon

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the MME Conference 1997
Place of Publication	Southampton
Pages	83-86
Publication status	Published - 31 Aug 1997

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@inproceedings{3273f1543779494b8ae6f7d36f6f3a80,

title = "Micromachining of planes in oriented silicon",

keywords = "METIS-130225",

author = "Berenschot, \{Johan W.\} and R.E. Oosterbroek and Lammerink, \{Theodorus S.J.\} and Elwenspoek, \{Michael Curt\}",

year = "1997",

month = aug,

day = "31",

language = "Undefined",

pages = "83--86",

booktitle = "Proceedings of the MME Conference 1997",

}