| Original language | English |
|---|---|
| Pages (from-to) | 15-22 |
| Journal | Journal A, Benelux Quarterly Journal on Automatic Control |
| Volume | 32 |
| Issue number | 3 |
| Publication status | Published - 1991 |
Micromechanical resonant sensors
M. Elwenspoek
Research output: Contribution to journal › Article › Academic › peer-review