Micromechanical resonant sensors

M. Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageEnglish
    Pages (from-to)15-22
    JournalJournal "A"
    Volume32
    Issue number3
    Publication statusPublished - 1991

    Cite this

    Elwenspoek, M. (1991). Micromechanical resonant sensors. Journal "A", 32(3), 15-22.