Micromechanical resonant sensors

M. Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageEnglish
    Pages (from-to)15-22
    JournalJournal "A"
    Volume32
    Issue number3
    Publication statusPublished - 1991

    Cite this

    Elwenspoek, M. (1991). Micromechanical resonant sensors. Journal "A", 32(3), 15-22.
    Elwenspoek, M. / Micromechanical resonant sensors. In: Journal "A". 1991 ; Vol. 32, No. 3. pp. 15-22.
    @article{7cff629d0dab4eb8a83df56dfff4bbf4,
    title = "Micromechanical resonant sensors",
    author = "M. Elwenspoek",
    year = "1991",
    language = "English",
    volume = "32",
    pages = "15--22",
    journal = "Journal {"}A{"}",
    issn = "0771-1107",
    publisher = "Publicarto N.V.",
    number = "3",

    }

    Elwenspoek, M 1991, 'Micromechanical resonant sensors', Journal "A", vol. 32, no. 3, pp. 15-22.

    Micromechanical resonant sensors. / Elwenspoek, M.

    In: Journal "A", Vol. 32, No. 3, 1991, p. 15-22.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Micromechanical resonant sensors

    AU - Elwenspoek, M.

    PY - 1991

    Y1 - 1991

    M3 - Article

    VL - 32

    SP - 15

    EP - 22

    JO - Journal "A"

    JF - Journal "A"

    SN - 0771-1107

    IS - 3

    ER -

    Elwenspoek M. Micromechanical resonant sensors. Journal "A". 1991;32(3):15-22.