Micromechanical sensors using encapsulated built-in resonant strain gauges

H.A.C. Tilmans

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 26 Jun 1992
Event	MESA Dag 1992 - Universiteit Twente, Enschede, Netherlands Duration: 26 Jun 1992 → 26 Jun 1992

Keywords

@conference{3d6a01f9f65140efb6a1d2c4e80a8fc6,

title = "Micromechanical sensors using encapsulated built-in resonant strain gauges",

keywords = "METIS-117966",

author = "H.A.C. Tilmans",

year = "1992",

month = jun,

day = "26",

language = "Undefined",

pages = "--",

note = "MESA Dag 1992 ; Conference date: 26-06-1992 Through 26-06-1992",

}