Micromechanically tuned ring resonator in silicon on insulator

L.J. Kauppinen, S.M. Chakkalakkal Abdulla, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Markus Pollnau, R.M. de Ridder

    Research output: Contribution to journalArticleAcademicpeer-review

    14 Citations (Scopus)

    Abstract

    We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.
    Original languageUndefined
    Pages (from-to)1047-1049
    Number of pages3
    JournalOptics letters
    Volume36
    Issue number7
    DOIs
    Publication statusPublished - 1 Apr 2011

    Keywords

    • METIS-277588
    • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
    • EWI-19838
    • IR-76449

    Cite this

    Kauppinen, L. J., Chakkalakkal Abdulla, S. M., Dijkstra, M., de Boer, M. J., Berenschot, J. W., Krijnen, G. J. M., ... de Ridder, R. M. (2011). Micromechanically tuned ring resonator in silicon on insulator. Optics letters, 36(7), 1047-1049. https://doi.org/10.1364/OL.36.001047
    Kauppinen, L.J. ; Chakkalakkal Abdulla, S.M. ; Dijkstra, Mindert ; de Boer, Meint J. ; Berenschot, Johan W. ; Krijnen, Gijsbertus J.M. ; Pollnau, Markus ; de Ridder, R.M. / Micromechanically tuned ring resonator in silicon on insulator. In: Optics letters. 2011 ; Vol. 36, No. 7. pp. 1047-1049.
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    abstract = "We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.",
    keywords = "METIS-277588, IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES, EWI-19838, IR-76449",
    author = "L.J. Kauppinen and {Chakkalakkal Abdulla}, S.M. and Mindert Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Krijnen, {Gijsbertus J.M.} and Markus Pollnau and {de Ridder}, R.M.",
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    Kauppinen, LJ, Chakkalakkal Abdulla, SM, Dijkstra, M, de Boer, MJ, Berenschot, JW, Krijnen, GJM, Pollnau, M & de Ridder, RM 2011, 'Micromechanically tuned ring resonator in silicon on insulator', Optics letters, vol. 36, no. 7, pp. 1047-1049. https://doi.org/10.1364/OL.36.001047

    Micromechanically tuned ring resonator in silicon on insulator. / Kauppinen, L.J.; Chakkalakkal Abdulla, S.M.; Dijkstra, Mindert; de Boer, Meint J.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Pollnau, Markus; de Ridder, R.M.

    In: Optics letters, Vol. 36, No. 7, 01.04.2011, p. 1047-1049.

    Research output: Contribution to journalArticleAcademicpeer-review

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    T1 - Micromechanically tuned ring resonator in silicon on insulator

    AU - Kauppinen, L.J.

    AU - Chakkalakkal Abdulla, S.M.

    AU - Dijkstra, Mindert

    AU - de Boer, Meint J.

    AU - Berenschot, Johan W.

    AU - Krijnen, Gijsbertus J.M.

    AU - Pollnau, Markus

    AU - de Ridder, R.M.

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    PY - 2011/4/1

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    AB - We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.

    KW - METIS-277588

    KW - IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

    KW - EWI-19838

    KW - IR-76449

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    DO - 10.1364/OL.36.001047

    M3 - Article

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    SP - 1047

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    JO - Optics letters

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