Micromechanically tuned ring resonator in silicon on insulator

L.J. Kauppinen, S.M. Chakkalakkal Abdulla, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Markus Pollnau, R.M. de Ridder

  • 14 Citations

Abstract

We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.
Original languageUndefined
Pages (from-to)1047-1049
Number of pages3
JournalOptics letters
Volume36
Issue number7
DOIs
StatePublished - 1 Apr 2011

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Wavelength
Evanescent fields
Optical devices
Silicon nitride
Resonators
Silicon

Keywords

  • METIS-277588
  • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
  • EWI-19838
  • IR-76449

Cite this

Kauppinen, L. J., Chakkalakkal Abdulla, S. M., Dijkstra, M., de Boer, M. J., Berenschot, J. W., Krijnen, G. J. M., ... de Ridder, R. M. (2011). Micromechanically tuned ring resonator in silicon on insulator. Optics letters, 36(7), 1047-1049. DOI: 10.1364/OL.36.001047

Kauppinen, L.J.; Chakkalakkal Abdulla, S.M.; Dijkstra, Mindert; de Boer, Meint J.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Pollnau, Markus; de Ridder, R.M. / Micromechanically tuned ring resonator in silicon on insulator.

In: Optics letters, Vol. 36, No. 7, 01.04.2011, p. 1047-1049.

Research output: Scientific - peer-reviewArticle

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keywords = "METIS-277588, IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES, EWI-19838, IR-76449",
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Kauppinen, LJ, Chakkalakkal Abdulla, SM, Dijkstra, M, de Boer, MJ, Berenschot, JW, Krijnen, GJM, Pollnau, M & de Ridder, RM 2011, 'Micromechanically tuned ring resonator in silicon on insulator' Optics letters, vol 36, no. 7, pp. 1047-1049. DOI: 10.1364/OL.36.001047

Micromechanically tuned ring resonator in silicon on insulator. / Kauppinen, L.J.; Chakkalakkal Abdulla, S.M.; Dijkstra, Mindert; de Boer, Meint J.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Pollnau, Markus; de Ridder, R.M.

In: Optics letters, Vol. 36, No. 7, 01.04.2011, p. 1047-1049.

Research output: Scientific - peer-reviewArticle

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AU - Chakkalakkal Abdulla,S.M.

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AU - Berenschot,Johan W.

AU - Krijnen,Gijsbertus J.M.

AU - Pollnau,Markus

AU - de Ridder,R.M.

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AB - We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.

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KW - IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

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Kauppinen LJ, Chakkalakkal Abdulla SM, Dijkstra M, de Boer MJ, Berenschot JW, Krijnen GJM et al. Micromechanically tuned ring resonator in silicon on insulator. Optics letters. 2011 Apr 1;36(7):1047-1049. Available from, DOI: 10.1364/OL.36.001047