Micromechanically tuned ring resonator in silicon on insulator

L.J. Kauppinen, S.M. Chakkalakkal Abdulla, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Markus Pollnau, R.M. de Ridder

    Research output: Contribution to journalArticleAcademicpeer-review

    17 Citations (Scopus)

    Abstract

    We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.
    Original languageEnglish
    Pages (from-to)1047-1049
    Number of pages3
    JournalOptics letters
    Volume36
    Issue number7
    DOIs
    Publication statusPublished - 1 Apr 2011

    Keywords

    • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

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