Micromechanically tuned ring resonator in silicon on insulator

Lasse J. Kauppinen, Shahina M.C. Abdulla, Meindert Dijkstra, Meint J. de Boer, Erwin Berenschot, Gijs J.M. Krijnen, Markus Pollnau, René M. de Ridder

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    Abstract

    We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.
    Original languageEnglish
    Pages (from-to)1047-1049
    Number of pages3
    JournalOptics letters
    Volume36
    Issue number7
    DOIs
    Publication statusPublished - 1 Apr 2011

    Keywords

    • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

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    • Micromechanically tuned ring resonator in silicon on insulator

      Kauppinen, L. J., Abdulla, S. M. C., Dijkstra, M., de Boer, M. J., Berenschot, E., Krijnen, G. J. M., Pollnau, M. & de Ridder, R. M., 2011, 2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim, CLEOPR 2011. Piscataway, NJ: IEEE, p. 682-684 3 p. 6193662

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    • Micromechanically Tuned Ring Resonator in Silicon on Insulator

      Kauppinen, L. J., Chakkalakkal Abdulla, S. M., Dijkstra, M., de Boer, M. J., Berenschot, E., Krijnen, G. J. M., Pollnau, M. & de Ridder, R. M., Aug 2011, International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011. Optica Publishing Group, 3 p. C171

      Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

      Open Access
      File

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