Micromechanically tuned ring resonator in silicon on insulator

L.J. Kauppinen, S.M. Chakkalakkal Abdulla, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Markus Pollnau, R.M. de Ridder

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    Abstract

    We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.
    Original languageUndefined
    Pages (from-to)1047-1049
    Number of pages3
    JournalOptics letters
    Volume36
    Issue number7
    DOIs
    Publication statusPublished - 1 Apr 2011

    Keywords

    • METIS-277588
    • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
    • EWI-19838
    • IR-76449

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