Micromechanically tuned ring resonator in silicon on insulator

L.J. Kauppinen, S.M. Chakkalakkal Abdulla, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Markus Pollnau, R.M. de Ridder

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.
    Original languageUndefined
    Title of host publicationInternational Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim
    Place of PublicationSydney
    PublisherAustralian Optical Society
    PagesPaper 4240-IT
    Number of pages3
    ISBN (Print)978-0-9775657-7-1
    Publication statusPublished - Aug 2011

    Publication series

    NameConference Handbook
    PublisherAustralian Optical Society

    Keywords

    • METIS-278778
    • IR-77968
    • EWI-20474
    • IOMS-SNS: SENSORS
    • TST-ACTUATORS

    Cite this

    Kauppinen, L. J., Chakkalakkal Abdulla, S. M., Dijkstra, M., de Boer, M. J., Berenschot, J. W., Krijnen, G. J. M., ... de Ridder, R. M. (2011). Micromechanically tuned ring resonator in silicon on insulator. In International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim (pp. Paper 4240-IT). (Conference Handbook). Sydney: Australian Optical Society.