Micromechanically tuned ring resonator in silicon on insulator

L.J. Kauppinen; S.M. Chakkalakkal Abdulla; Mindert Dijkstra; Meint J. de Boer; Johan W. Berenschot; Gijsbertus J.M. Krijnen; Markus Pollnau; R.M. de Ridder

Micromechanically tuned ring resonator in silicon on insulator

L.J. Kauppinen, S.M. Chakkalakkal Abdulla, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Markus Pollnau, R.M. de Ridder

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

Original language	Undefined
Title of host publication	International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim
Place of Publication	Sydney
Publisher	Australian Optical Society
Pages	Paper 4240-IT
Number of pages	3
ISBN (Print)	978-0-9775657-7-1
Publication status	Published - Aug 2011

Publication series

Name	Conference Handbook
Publisher	Australian Optical Society

Keywords

METIS-278778
IR-77968
EWI-20474
IOMS-SNS: SENSORS
TST-ACTUATORS

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Cite this

Kauppinen, L. J., Chakkalakkal Abdulla, S. M., Dijkstra, M., de Boer, M. J., Berenschot, J. W., Krijnen, G. J. M., ... de Ridder, R. M. (2011). Micromechanically tuned ring resonator in silicon on insulator. In International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim (pp. Paper 4240-IT). (Conference Handbook). Sydney: Australian Optical Society.

Kauppinen, L.J. ; Chakkalakkal Abdulla, S.M. ; Dijkstra, Mindert ; de Boer, Meint J. ; Berenschot, Johan W. ; Krijnen, Gijsbertus J.M. ; Pollnau, Markus ; de Ridder, R.M. / Micromechanically tuned ring resonator in silicon on insulator. International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim. Sydney : Australian Optical Society, 2011. pp. Paper 4240-IT (Conference Handbook).

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title = "Micromechanically tuned ring resonator in silicon on insulator",

abstract = "Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.",

keywords = "METIS-278778, IR-77968, EWI-20474, IOMS-SNS: SENSORS, TST-ACTUATORS",

author = "L.J. Kauppinen and {Chakkalakkal Abdulla}, S.M. and Mindert Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Krijnen, {Gijsbertus J.M.} and Markus Pollnau and {de Ridder}, R.M.",

note = "Paper 4240-IT - Conference Handbook",

year = "2011",

month = "8",

language = "Undefined",

isbn = "978-0-9775657-7-1",

series = "Conference Handbook",

publisher = "Australian Optical Society",

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Kauppinen, LJ, Chakkalakkal Abdulla, SM, Dijkstra, M, de Boer, MJ, Berenschot, JW , Krijnen, GJM, Pollnau, M & de Ridder, RM 2011, Micromechanically tuned ring resonator in silicon on insulator. in International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim. Conference Handbook, Australian Optical Society, Sydney, pp. Paper 4240-IT.

Micromechanically tuned ring resonator in silicon on insulator. / Kauppinen, L.J.; Chakkalakkal Abdulla, S.M.; Dijkstra, Mindert; de Boer, Meint J.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Pollnau, Markus; de Ridder, R.M.

International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim. Sydney : Australian Optical Society, 2011. p. Paper 4240-IT (Conference Handbook).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Chakkalakkal Abdulla, S.M.

AU - Dijkstra, Mindert

AU - de Boer, Meint J.

AU - Berenschot, Johan W.

AU - Krijnen, Gijsbertus J.M.

AU - Pollnau, Markus

AU - de Ridder, R.M.

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N2 - Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

AB - Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

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KW - IR-77968

KW - EWI-20474

KW - IOMS-SNS: SENSORS

KW - TST-ACTUATORS

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BT - International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim

PB - Australian Optical Society

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