Micromechanically tuned ring resonator in silicon on insulator

L.J. Kauppinen, S.M. Chakkalakkal Abdulla, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Markus Pollnau, R.M. de Ridder

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.
Original languageUndefined
Title of host publicationInternational Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim
Place of PublicationSydney
PublisherAustralian Optical Society
PagesPaper 4240-IT
Number of pages3
ISBN (Print)978-0-9775657-7-1
Publication statusPublished - Aug 2011

Publication series

NameConference Handbook
PublisherAustralian Optical Society

Keywords

  • METIS-278778
  • IR-77968
  • EWI-20474
  • IOMS-SNS: SENSORS
  • TST-ACTUATORS

Cite this

Kauppinen, L. J., Chakkalakkal Abdulla, S. M., Dijkstra, M., de Boer, M. J., Berenschot, J. W., Krijnen, G. J. M., ... de Ridder, R. M. (2011). Micromechanically tuned ring resonator in silicon on insulator. In International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim (pp. Paper 4240-IT). (Conference Handbook). Sydney: Australian Optical Society.
Kauppinen, L.J. ; Chakkalakkal Abdulla, S.M. ; Dijkstra, Mindert ; de Boer, Meint J. ; Berenschot, Johan W. ; Krijnen, Gijsbertus J.M. ; Pollnau, Markus ; de Ridder, R.M. / Micromechanically tuned ring resonator in silicon on insulator. International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim. Sydney : Australian Optical Society, 2011. pp. Paper 4240-IT (Conference Handbook).
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keywords = "METIS-278778, IR-77968, EWI-20474, IOMS-SNS: SENSORS, TST-ACTUATORS",
author = "L.J. Kauppinen and {Chakkalakkal Abdulla}, S.M. and Mindert Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Krijnen, {Gijsbertus J.M.} and Markus Pollnau and {de Ridder}, R.M.",
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isbn = "978-0-9775657-7-1",
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Kauppinen, LJ, Chakkalakkal Abdulla, SM, Dijkstra, M, de Boer, MJ, Berenschot, JW, Krijnen, GJM, Pollnau, M & de Ridder, RM 2011, Micromechanically tuned ring resonator in silicon on insulator. in International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim. Conference Handbook, Australian Optical Society, Sydney, pp. Paper 4240-IT.

Micromechanically tuned ring resonator in silicon on insulator. / Kauppinen, L.J.; Chakkalakkal Abdulla, S.M.; Dijkstra, Mindert; de Boer, Meint J.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Pollnau, Markus; de Ridder, R.M.

International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim. Sydney : Australian Optical Society, 2011. p. Paper 4240-IT (Conference Handbook).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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AU - Chakkalakkal Abdulla, S.M.

AU - Dijkstra, Mindert

AU - de Boer, Meint J.

AU - Berenschot, Johan W.

AU - Krijnen, Gijsbertus J.M.

AU - Pollnau, Markus

AU - de Ridder, R.M.

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AB - Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

KW - METIS-278778

KW - IR-77968

KW - EWI-20474

KW - IOMS-SNS: SENSORS

KW - TST-ACTUATORS

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Kauppinen LJ, Chakkalakkal Abdulla SM, Dijkstra M, de Boer MJ, Berenschot JW, Krijnen GJM et al. Micromechanically tuned ring resonator in silicon on insulator. In International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim. Sydney: Australian Optical Society. 2011. p. Paper 4240-IT. (Conference Handbook).