Micromechanically Tuned Ring Resonator in Silicon on Insulator

L.J. Kauppinen; S.M. Chakkalakkal Abdulla; M. Dijkstra; M.J. de Boer; E. Berenschot; G.J.M. Krijnen; M. Pollnau; R.M. de Ridder

Micromechanically Tuned Ring Resonator in Silicon on Insulator

L.J. Kauppinen, S.M. Chakkalakkal Abdulla, M. Dijkstra, M.J. de Boer, E. Berenschot, G.J.M. Krijnen, M. Pollnau, R.M. de Ridder

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Downloads (Pure)

Abstract

Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

Original language	English
Title of host publication	International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
Publisher	Optica Publishing Group
Number of pages	3
ISBN (Print)	978-0-9775657-7-1
Publication status	Published - Aug 2011
Event	International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim - Sydney, Australia Duration: 28 Aug 2011 → 1 Sept 2011

Conference

Conference	International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim
Period	28/08/11 → 1/09/11
Other	28 August - 1 September 2011

Keywords

IOMS-SNS: SENSORS
TST-ACTUATORS
2023 OA procedure

Access to Document

ArticleFinal published version, 247 KBLicence: Taverne

1 Conference contribution
1 Article

Micromechanically tuned ring resonator in silicon on insulator
Kauppinen, L. J., Abdulla, S. M. C., Dijkstra, M., de Boer, M. J., Berenschot, E., Krijnen, G. J. M., Pollnau, M. & de Ridder, R. M., 2011, 2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim, CLEOPR 2011. Piscataway, NJ: IEEE, p. 682-684 3 p. 6193662
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access
File
4 Downloads (Pure)
Micromechanically tuned ring resonator in silicon on insulator
Kauppinen, L. J., Abdulla, S. M. C., Dijkstra, M., de Boer, M. J., Berenschot, E., Krijnen, G. J. M., Pollnau, M. & de Ridder, R. M., 1 Apr 2011, In: Optics letters. 36, 7, p. 1047-1049 3 p.
Research output: Contribution to journal › Article › Academic › peer-review

Open Access
File
17 Citations (Scopus)

1 Downloads (Pure)

Cite this

@inproceedings{405702d4734b487995e51b45990d6c22,

title = "Micromechanically Tuned Ring Resonator in Silicon on Insulator",

abstract = "Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.",

keywords = "IOMS-SNS: SENSORS, TST-ACTUATORS, 2023 OA procedure",

author = "L.J. Kauppinen and {Chakkalakkal Abdulla}, S.M. and M. Dijkstra and {de Boer}, M.J. and E. Berenschot and G.J.M. Krijnen and M. Pollnau and {de Ridder}, R.M.",

year = "2011",

month = aug,

language = "English",

isbn = "978-0-9775657-7-1",

booktitle = "International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011",

publisher = "Optica Publishing Group",

note = "International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim ; Conference date: 28-08-2011 Through 01-09-2011",

}

Kauppinen, LJ, Chakkalakkal Abdulla, SM, Dijkstra, M, de Boer, MJ, Berenschot, E , Krijnen, GJM, Pollnau, M & de Ridder, RM 2011, Micromechanically Tuned Ring Resonator in Silicon on Insulator. in International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011., C171, Optica Publishing Group, International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28/08/11.

Micromechanically Tuned Ring Resonator in Silicon on Insulator. / Kauppinen, L.J.; Chakkalakkal Abdulla, S.M.; Dijkstra, M. et al.
International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011. Optica Publishing Group, 2011. C171.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Micromechanically Tuned Ring Resonator in Silicon on Insulator

AU - Kauppinen, L.J.

AU - Chakkalakkal Abdulla, S.M.

AU - Dijkstra, M.

AU - de Boer, M.J.

AU - Berenschot, E.

AU - Krijnen, G.J.M.

AU - Pollnau, M.

AU - de Ridder, R.M.

PY - 2011/8

Y1 - 2011/8

N2 - Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

AB - Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

KW - IOMS-SNS: SENSORS

KW - TST-ACTUATORS

KW - 2023 OA procedure

M3 - Conference contribution

SN - 978-0-9775657-7-1

BT - International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011

PB - Optica Publishing Group

T2 - International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim

Y2 - 28 August 2011 through 1 September 2011

ER -

Micromechanically Tuned Ring Resonator in Silicon on Insulator

Abstract

Conference

Keywords

Access to Document

Fingerprint

Research output

Micromechanically tuned ring resonator in silicon on insulator

Micromechanically tuned ring resonator in silicon on insulator

Cite this