Micromechanically Tuned Ring Resonator in Silicon on Insulator

L.J. Kauppinen; S.M. Chakkalakkal Abdulla; M. Dijkstra; M.J. de Boer; E. Berenschot; G.J.M. Krijnen; M. Pollnau; R.M. de Ridder

Micromechanically Tuned Ring Resonator in Silicon on Insulator

L.J. Kauppinen, S.M. Chakkalakkal Abdulla, M. Dijkstra, M.J. de Boer, E. Berenschot, G.J.M. Krijnen, M. Pollnau, R.M. de Ridder

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

Original language	English
Title of host publication	International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
Publisher	Optica Publishing Group (formerly OSA)
Number of pages	3
ISBN (Print)	978-0-9775657-7-1
Publication status	Published - Aug 2011
Event	International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim - Sydney, Australia Duration: 28 Aug 2011 → 1 Sept 2011

Conference

Conference	International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim
Period	28/08/11 → 1/09/11
Other	28 August - 1 September 2011

Keywords

IOMS-SNS: SENSORS
TST-ACTUATORS
2023 OA procedure

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ArticleFinal published version, 247 KBLicence: Taverne

1 Conference contribution
1 Article

Micromechanically tuned ring resonator in silicon on insulator
Kauppinen, L. J., Abdulla, S. M. C., Dijkstra, M., de Boer, M. J., Berenschot, E., Krijnen, G. J. M., Pollnau, M. & de Ridder, R. M., 2011, 2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim, CLEOPR 2011. Piscataway, NJ: IEEE, p. 682-684 3 p. 6193662
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access
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Micromechanically tuned ring resonator in silicon on insulator
Kauppinen, L. J., Abdulla, S. M. C., Dijkstra, M., de Boer, M. J., Berenschot, E., Krijnen, G. J. M., Pollnau, M. & de Ridder, R. M., 1 Apr 2011, In: Optics letters. 36, 7, p. 1047-1049 3 p.
Research output: Contribution to journal › Article › Academic › peer-review

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Kauppinen, L. J., Chakkalakkal Abdulla, S. M., Dijkstra, M., de Boer, M. J., Berenschot, E., Krijnen, G. J. M., Pollnau, M., & de Ridder, R. M. (2011). Micromechanically Tuned Ring Resonator in Silicon on Insulator. In International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011 Article C171 Optica Publishing Group (formerly OSA).

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title = "Micromechanically Tuned Ring Resonator in Silicon on Insulator",

abstract = "Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.",

keywords = "IOMS-SNS: SENSORS, TST-ACTUATORS, 2023 OA procedure",

author = "L.J. Kauppinen and {Chakkalakkal Abdulla}, S.M. and M. Dijkstra and {de Boer}, M.J. and E. Berenschot and G.J.M. Krijnen and M. Pollnau and {de Ridder}, R.M.",

year = "2011",

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booktitle = "International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011",

publisher = "Optica Publishing Group (formerly OSA)",

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note = "International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim ; Conference date: 28-08-2011 Through 01-09-2011",

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Kauppinen, LJ, Chakkalakkal Abdulla, SM, Dijkstra, M, de Boer, MJ, Berenschot, E , Krijnen, GJM, Pollnau, M & de Ridder, RM 2011, Micromechanically Tuned Ring Resonator in Silicon on Insulator. in International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011., C171, Optica Publishing Group (formerly OSA), International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28/08/11.

Micromechanically Tuned Ring Resonator in Silicon on Insulator. / Kauppinen, L.J.; Chakkalakkal Abdulla, S.M.; Dijkstra, M. et al.
International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011. Optica Publishing Group (formerly OSA), 2011. C171.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Micromechanically Tuned Ring Resonator in Silicon on Insulator

AU - Kauppinen, L.J.

AU - Chakkalakkal Abdulla, S.M.

AU - Dijkstra, M.

AU - de Boer, M.J.

AU - Berenschot, E.

AU - Krijnen, G.J.M.

AU - Pollnau, M.

AU - de Ridder, R.M.

PY - 2011/8

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N2 - Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

AB - Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

KW - IOMS-SNS: SENSORS

KW - TST-ACTUATORS

KW - 2023 OA procedure

M3 - Conference contribution

SN - 978-0-9775657-7-1

BT - International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011

PB - Optica Publishing Group (formerly OSA)

T2 - International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim

Y2 - 28 August 2011 through 1 September 2011

ER -

Micromechanically Tuned Ring Resonator in Silicon on Insulator

Abstract

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Keywords

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Research output

Micromechanically tuned ring resonator in silicon on insulator

Micromechanically tuned ring resonator in silicon on insulator

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