Micromechanically tuned ring resonator in silicon on insulator

L.J. Kauppinen, S.M. Chakkalakkal Abdulla, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Markus Pollnau, R.M. de Ridder

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    Abstract

    Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.
    Original languageUndefined
    Title of host publicationInternational Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim
    Place of PublicationSydney
    PublisherAustralian Optical Society
    PagesPaper 4240-IT
    Number of pages3
    ISBN (Print)978-0-9775657-7-1
    Publication statusPublished - Aug 2011

    Publication series

    NameConference Handbook
    PublisherAustralian Optical Society

    Keywords

    • METIS-278778
    • IR-77968
    • EWI-20474
    • IOMS-SNS: SENSORS
    • TST-ACTUATORS

    Cite this

    Kauppinen, L. J., Chakkalakkal Abdulla, S. M., Dijkstra, M., de Boer, M. J., Berenschot, J. W., Krijnen, G. J. M., ... de Ridder, R. M. (2011). Micromechanically tuned ring resonator in silicon on insulator. In International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim (pp. Paper 4240-IT). (Conference Handbook). Sydney: Australian Optical Society.
    Kauppinen, L.J. ; Chakkalakkal Abdulla, S.M. ; Dijkstra, Mindert ; de Boer, Meint J. ; Berenschot, Johan W. ; Krijnen, Gijsbertus J.M. ; Pollnau, Markus ; de Ridder, R.M. / Micromechanically tuned ring resonator in silicon on insulator. International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim. Sydney : Australian Optical Society, 2011. pp. Paper 4240-IT (Conference Handbook).
    @inproceedings{405702d4734b487995e51b45990d6c22,
    title = "Micromechanically tuned ring resonator in silicon on insulator",
    abstract = "Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.",
    keywords = "METIS-278778, IR-77968, EWI-20474, IOMS-SNS: SENSORS, TST-ACTUATORS",
    author = "L.J. Kauppinen and {Chakkalakkal Abdulla}, S.M. and Mindert Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Krijnen, {Gijsbertus J.M.} and Markus Pollnau and {de Ridder}, R.M.",
    note = "Paper 4240-IT - Conference Handbook",
    year = "2011",
    month = "8",
    language = "Undefined",
    isbn = "978-0-9775657-7-1",
    series = "Conference Handbook",
    publisher = "Australian Optical Society",
    pages = "Paper 4240--IT",
    booktitle = "International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim",

    }

    Kauppinen, LJ, Chakkalakkal Abdulla, SM, Dijkstra, M, de Boer, MJ, Berenschot, JW, Krijnen, GJM, Pollnau, M & de Ridder, RM 2011, Micromechanically tuned ring resonator in silicon on insulator. in International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim. Conference Handbook, Australian Optical Society, Sydney, pp. Paper 4240-IT.

    Micromechanically tuned ring resonator in silicon on insulator. / Kauppinen, L.J.; Chakkalakkal Abdulla, S.M.; Dijkstra, Mindert; de Boer, Meint J.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Pollnau, Markus; de Ridder, R.M.

    International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim. Sydney : Australian Optical Society, 2011. p. Paper 4240-IT (Conference Handbook).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    TY - GEN

    T1 - Micromechanically tuned ring resonator in silicon on insulator

    AU - Kauppinen, L.J.

    AU - Chakkalakkal Abdulla, S.M.

    AU - Dijkstra, Mindert

    AU - de Boer, Meint J.

    AU - Berenschot, Johan W.

    AU - Krijnen, Gijsbertus J.M.

    AU - Pollnau, Markus

    AU - de Ridder, R.M.

    N1 - Paper 4240-IT - Conference Handbook

    PY - 2011/8

    Y1 - 2011/8

    N2 - Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

    AB - Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

    KW - METIS-278778

    KW - IR-77968

    KW - EWI-20474

    KW - IOMS-SNS: SENSORS

    KW - TST-ACTUATORS

    M3 - Conference contribution

    SN - 978-0-9775657-7-1

    T3 - Conference Handbook

    SP - Paper 4240-IT

    BT - International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim

    PB - Australian Optical Society

    CY - Sydney

    ER -

    Kauppinen LJ, Chakkalakkal Abdulla SM, Dijkstra M, de Boer MJ, Berenschot JW, Krijnen GJM et al. Micromechanically tuned ring resonator in silicon on insulator. In International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim. Sydney: Australian Optical Society. 2011. p. Paper 4240-IT. (Conference Handbook).

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