Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.
|Publisher||Australian Optical Society|
|Conference||International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim|
|Period||28/08/11 → 1/09/11|
|Other||28 August - 1 September 2011|
- IOMS-SNS: SENSORS