Micromechanically tuned ring resonator in silicon on insulator

L.J. Kauppinen; S.M.C. Abdulla; M. Dijkstra; M.J. de Boer; E. Berenschot; G.J.M. Krijnen; M. Pollnau; R.M. de Ridder

doi:10.1109/IQEC-CLEO.2011.6193662

Micromechanically tuned ring resonator in silicon on insulator

L.J. Kauppinen, S.M.C. Abdulla, M. Dijkstra, M.J. de Boer, E. Berenschot, G.J.M. Krijnen, M. Pollnau, R.M. de Ridder

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

Original language	English
Title of host publication	2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim, CLEOPR 2011
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	682-684
Number of pages	3
ISBN (Electronic)	978-0-9775657-8-8
ISBN (Print)	978-1-4577-1939-4, 978-1-4577-1940-0 (CD)
DOIs	https://doi.org/10.1109/IQEC-CLEO.2011.6193662
Publication status	Published - 2011
Event	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2011 - Sydney, Australia Duration: 28 Aug 2011 → 1 Sept 2011

Conference

Conference	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2011
Abbreviated title	CLEOPR 2011
Country/Territory	Australia
City	Sydney
Period	28/08/11 → 1/09/11

Keywords

2023 OA procedure

Access to Document

10.1109/IQEC-CLEO.2011.6193662

ArticleFinal published version, 178 KBLicence: Taverne

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Kauppinen, L. J., Abdulla, S. M. C., Dijkstra, M., de Boer, M. J., Berenschot, E., Krijnen, G. J. M., Pollnau, M., & de Ridder, R. M. (2011). Micromechanically tuned ring resonator in silicon on insulator. In 2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim, CLEOPR 2011 (pp. 682-684). Article 6193662 IEEE. https://doi.org/10.1109/IQEC-CLEO.2011.6193662

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title = "Micromechanically tuned ring resonator in silicon on insulator",

abstract = "Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.",

keywords = "2023 OA procedure",

author = "L.J. Kauppinen and S.M.C. Abdulla and M. Dijkstra and {de Boer}, M.J. and E. Berenschot and G.J.M. Krijnen and M. Pollnau and {de Ridder}, R.M.",

year = "2011",

doi = "10.1109/IQEC-CLEO.2011.6193662",

language = "English",

isbn = "978-1-4577-1939-4",

pages = "682--684",

booktitle = "2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim, CLEOPR 2011",

publisher = "IEEE",

address = "United States",

note = "Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2011, CLEOPR 2011 ; Conference date: 28-08-2011 Through 01-09-2011",

}

Kauppinen, LJ, Abdulla, SMC, Dijkstra, M, de Boer, MJ, Berenschot, E , Krijnen, GJM, Pollnau, M & de Ridder, RM 2011, Micromechanically tuned ring resonator in silicon on insulator. in 2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim, CLEOPR 2011., 6193662, IEEE, Piscataway, NJ, pp. 682-684, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2011, Sydney, Australia, 28/08/11. https://doi.org/10.1109/IQEC-CLEO.2011.6193662

Micromechanically tuned ring resonator in silicon on insulator. / Kauppinen, L.J.; Abdulla, S.M.C.; Dijkstra, M. et al.
2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim, CLEOPR 2011. Piscataway, NJ: IEEE, 2011. p. 682-684 6193662.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Micromechanically tuned ring resonator in silicon on insulator

AU - Kauppinen, L.J.

AU - Abdulla, S.M.C.

AU - Dijkstra, M.

AU - de Boer, M.J.

AU - Berenschot, E.

AU - Krijnen, G.J.M.

AU - Pollnau, M.

AU - de Ridder, R.M.

PY - 2011

Y1 - 2011

N2 - Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

AB - Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

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DO - 10.1109/IQEC-CLEO.2011.6193662

M3 - Conference contribution

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SN - 978-1-4577-1939-4

SN - 978-1-4577-1940-0 (CD)

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BT - 2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim, CLEOPR 2011

PB - IEEE

CY - Piscataway, NJ

T2 - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2011

Y2 - 28 August 2011 through 1 September 2011

ER -

Micromechanically tuned ring resonator in silicon on insulator

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Keywords

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Micromechanically tuned ring resonator in silicon on insulator

Micromechanically Tuned Ring Resonator in Silicon on Insulator

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