Micromechanically tuned ring resonator in silicon on insulator

Lasse J. Kauppinen; Shahina M.C. Abdulla; Meindert Dijkstra; Meint J. de Boer; Erwin Berenschot; Gijs J.M. Krijnen; Markus Pollnau; René M. de Ridder

doi:10.1364/OL.36.001047

Micromechanically tuned ring resonator in silicon on insulator

Lasse J. Kauppinen
, Shahina M.C. Abdulla
, Meindert Dijkstra
, Meint J. de Boer
, Erwin Berenschot
, Gijs J.M. Krijnen
, Markus Pollnau
, René M. de Ridder

Research output: Contribution to journal › Article › Academic › peer-review

17 Citations (Scopus)

71 Downloads (Pure)

Abstract

We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.

Original language	English
Pages (from-to)	1047-1049
Number of pages	3
Journal	Optics letters
Volume	36
Issue number	7
DOIs	https://doi.org/10.1364/OL.36.001047
Publication status	Published - 1 Apr 2011

Keywords

IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

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10.1364/OL.36.001047

ArticleFinal published version, 371 KBLicence: Taverne

17 Citations
2 Conference contribution

Micromechanically tuned ring resonator in silicon on insulator
Kauppinen, L. J., Abdulla, S. M. C., Dijkstra, M., de Boer, M. J., Berenschot, E., Krijnen, G. J. M., Pollnau, M. & de Ridder, R. M., 2011, 2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim, CLEOPR 2011. Piscataway, NJ: IEEE, p. 682-684 3 p. 6193662
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Micromechanically Tuned Ring Resonator in Silicon on Insulator
Kauppinen, L. J., Chakkalakkal Abdulla, S. M., Dijkstra, M., de Boer, M. J., Berenschot, E., Krijnen, G. J. M., Pollnau, M. & de Ridder, R. M., Aug 2011, International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011. Optica Publishing Group (formerly OSA), 3 p. C171
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access
File

Cite this

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title = "Micromechanically tuned ring resonator in silicon on insulator",

abstract = "We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.",

keywords = "IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES",

author = "Kauppinen, \{Lasse J.\} and Abdulla, \{Shahina M.C.\} and Meindert Dijkstra and \{de Boer\}, \{Meint J.\} and Erwin Berenschot and Krijnen, \{Gijs J.M.\} and Markus Pollnau and \{de Ridder\}, \{Ren{\'e} M.\}",

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doi = "10.1364/OL.36.001047",

language = "English",

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journal = "Optics letters",

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AU - Kauppinen, Lasse J.

AU - Abdulla, Shahina M.C.

AU - Dijkstra, Meindert

AU - de Boer, Meint J.

AU - Berenschot, Erwin

AU - Krijnen, Gijs J.M.

AU - Pollnau, Markus

AU - de Ridder, René M.

PY - 2011/4/1

Y1 - 2011/4/1

N2 - We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.

AB - We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.

KW - IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

U2 - 10.1364/OL.36.001047

DO - 10.1364/OL.36.001047

M3 - Article

SN - 0146-9592

VL - 36

SP - 1047

EP - 1049

JO - Optics letters

JF - Optics letters

IS - 7

ER -

Micromechanically tuned ring resonator in silicon on insulator

Abstract

Keywords

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Micromechanically tuned ring resonator in silicon on insulator

Micromechanically Tuned Ring Resonator in Silicon on Insulator

Cite this