Micrometer-sized Isolated Patterns of Conductive ZnO derived by Micromoulding

Ole F. Göbel, Johan E. ten Elshof, David A.H. Blank

Research output: Contribution to conferencePosterOther research output

Abstract

We succeeded in the fabrication of large-area patterns with micrometer-sized, isolated features of a simple oxide by a technically simple patterning method.

By micromoulding a polymeric precursor solution for ZnO with an elastomeric (PDMS) mould, and a subsequent heat treatment, patterned ZnO films could be obtained. The features of the various patterns, including parallel or crossed lines and arrangements of dots, were several micrometers in diameter, and so were the spaces between them. The features were nearly isolated from each other, as the micromoulding process left behind a thin residual layer of ZnO of only about 15 nm thickness. By applying a tempering step, the transparent films could be rendered conductive. The process was applied successfully also to other oxide materials such as Bi2212 or CoFe2O4.
Original languageEnglish
Publication statusPublished - 22 Feb 2009
EventDPG-Frühjahrstagung 2009 Dresden: (DPG Spring Meeting) - Dresden, Germany
Duration: 22 Feb 200927 Feb 2009
https://www.dpg-verhandlungen.de/year/2009/conference/dresden/parts?lang=de

Conference

ConferenceDPG-Frühjahrstagung 2009 Dresden
Country/TerritoryGermany
CityDresden
Period22/02/0927/02/09
Internet address

Keywords

  • METIS-261138

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