Micromolding for ceramic microneedle arrays

S. Bystrova; R. Lüttge

doi:10.1016/j.mrr.2010.12.067

Micromolding for ceramic microneedle arrays

S. Bystrova^*, R. Lüttge

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

119 Citations (Scopus)

27 Downloads (Pure)

Abstract

The fabrication process of ceramic microneedle arrays (MNAs) is presented. This includes the manufacturing of an SU-8/Si-master, its double replication resulting in a PDMS mold for production by micromolding and ceramic sintering. The robustness of the replicated structures was tested by means of microindentation techniques eliminating shear forces and by manual application of MNAs into silicone rubber. No damages of MNAs were observed using controlled microindentation. After the manual application, however, some microneedles were broken and left in the silicone. The opportunities and the ways to solve underlying problems of the fabrication process will be suggested and discussed

Original language	English
Pages (from-to)	1681-1684
Number of pages	4
Journal	Microelectronic engineering
Volume	88
Issue number	8
DOIs	https://doi.org/10.1016/j.mrr.2010.12.067
Publication status	Published - 2011

Keywords

n/a OA procedure

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1016/j.mrr.2010.12.067

Cite this

@article{afe8c9b744684f9f89b8c33038133ca6,

title = "Micromolding for ceramic microneedle arrays",

abstract = "The fabrication process of ceramic microneedle arrays (MNAs) is presented. This includes the manufacturing of an SU-8/Si-master, its double replication resulting in a PDMS mold for production by micromolding and ceramic sintering. The robustness of the replicated structures was tested by means of microindentation techniques eliminating shear forces and by manual application of MNAs into silicone rubber. No damages of MNAs were observed using controlled microindentation. After the manual application, however, some microneedles were broken and left in the silicone. The opportunities and the ways to solve underlying problems of the fabrication process will be suggested and discussed",

keywords = "n/a OA procedure",

author = "S. Bystrova and R. L{\"u}ttge",

year = "2011",

doi = "10.1016/j.mrr.2010.12.067",

language = "English",

volume = "88",

pages = "1681--1684",

journal = "Microelectronic engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "8",

}

TY - JOUR

T1 - Micromolding for ceramic microneedle arrays

AU - Bystrova, S.

AU - Lüttge, R.

PY - 2011

Y1 - 2011

N2 - The fabrication process of ceramic microneedle arrays (MNAs) is presented. This includes the manufacturing of an SU-8/Si-master, its double replication resulting in a PDMS mold for production by micromolding and ceramic sintering. The robustness of the replicated structures was tested by means of microindentation techniques eliminating shear forces and by manual application of MNAs into silicone rubber. No damages of MNAs were observed using controlled microindentation. After the manual application, however, some microneedles were broken and left in the silicone. The opportunities and the ways to solve underlying problems of the fabrication process will be suggested and discussed

AB - The fabrication process of ceramic microneedle arrays (MNAs) is presented. This includes the manufacturing of an SU-8/Si-master, its double replication resulting in a PDMS mold for production by micromolding and ceramic sintering. The robustness of the replicated structures was tested by means of microindentation techniques eliminating shear forces and by manual application of MNAs into silicone rubber. No damages of MNAs were observed using controlled microindentation. After the manual application, however, some microneedles were broken and left in the silicone. The opportunities and the ways to solve underlying problems of the fabrication process will be suggested and discussed

KW - n/a OA procedure

U2 - 10.1016/j.mrr.2010.12.067

DO - 10.1016/j.mrr.2010.12.067

M3 - Article

SN - 0167-9317

VL - 88

SP - 1681

EP - 1684

JO - Microelectronic engineering

JF - Microelectronic engineering

IS - 8

ER -

Micromolding for ceramic microneedle arrays

Abstract

Keywords

UN SDGs

Access to Document

Fingerprint

Cite this