| Original language | English |
|---|---|
| Patent number | IL152271 |
| IPC | G03F 7/ 00 A I |
| Priority date | 13/10/02 |
| Publication status | Published - 10 Apr 2006 |
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Research output: Patent
| Original language | English |
|---|---|
| Patent number | IL152271 |
| IPC | G03F 7/ 00 A I |
| Priority date | 13/10/02 |
| Publication status | Published - 10 Apr 2006 |