Abstract
A modified chemical vapour deposition (CVD) and electrochemical vapour deposition (EVD) technique is developed to prepared microporous or dense ceramic membranes by modifying ultrafiltration alumina membranes. Using this CVD/EVD technique, thin (2-5μm) or very thin (0.2-1μm) dense gastight yttria stabilized zirconia films which are oxygen semipermeable were grown on various types of porous substrates. The surface properties and pore size of the top layer of the alumina membranes were modified by depositing a zirconia/yttria solid solution on the internal pore surface of the membrane top layer in order to obtain gas separation properties of surface diffusion or microporous diffusion.
Original language | English |
---|---|
Title of host publication | Inorganic Membranes ICIM2-91 |
Subtitle of host publication | Proceedings of the 2nd International Conference on Inorganic Membranes - ICIM2-91 |
Editors | A.J. Burggraaf, J. Charpin, L. Cot |
Publisher | Trans Tech Publications Ltd |
Pages | 465-468 |
Number of pages | 4 |
ISBN (Print) | 0878496254 |
DOIs | |
Publication status | Published - 1 Dec 1991 |
Event | 2nd International Conference on Inorganic Membranes, ICIM 1991 - Montpellier, France Duration: 1 Jul 1991 → 4 Jul 1991 Conference number: 2 |
Publication series
Name | Key Engineering Materials |
---|---|
Publisher | Trans Tech Publications Ltd |
Volume | 61-62 |
ISSN (Print) | 1013-9826 |
Conference
Conference | 2nd International Conference on Inorganic Membranes, ICIM 1991 |
---|---|
Abbreviated title | ICIM |
Country/Territory | France |
City | Montpellier |
Period | 1/07/91 → 4/07/91 |