Microporous and dense ceramic membranes prepared by CVD and EVD

Y.S. Lin*, J. Meijerink, H.W. Brinkman, K.J. de Vries, A.J. Burggraaf

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)


A modified chemical vapour deposition (CVD) and electrochemical vapour deposition (EVD) technique is developed to prepared microporous or dense ceramic membranes by modifying ultrafiltration alumina membranes. Using this CVD/EVD technique, thin (2-5μm) or very thin (0.2-1μm) dense gastight yttria stabilized zirconia films which are oxygen semipermeable were grown on various types of porous substrates. The surface properties and pore size of the top layer of the alumina membranes were modified by depositing a zirconia/yttria solid solution on the internal pore surface of the membrane top layer in order to obtain gas separation properties of surface diffusion or microporous diffusion.

Original languageEnglish
Title of host publicationInorganic Membranes ICIM2-91
Subtitle of host publicationProceedings of the 2nd International Conference on Inorganic Membranes - ICIM2-91
EditorsA.J. Burggraaf, J. Charpin, L. Cot
PublisherTrans Tech Publications Ltd
Number of pages4
ISBN (Print)0878496254
Publication statusPublished - 1 Dec 1991
Event2nd International Conference on Inorganic Membranes, ICIM 1991 - Montpellier, France
Duration: 1 Jul 19914 Jul 1991
Conference number: 2

Publication series

NameKey Engineering Materials
PublisherTrans Tech Publications Ltd
ISSN (Print)1013-9826


Conference2nd International Conference on Inorganic Membranes, ICIM 1991
Abbreviated titleICIM

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