Microscopic theory of atomic diffusion mechanisms in silicon

R. Car; P. J. Kelly; A. Oshiyama; S. T. Pantelides

doi:10.1016/S0378-4363(84)80064-9

Microscopic theory of atomic diffusion mechanisms in silicon

R. Car^*
, P. J. Kelly
, A. Oshiyama
, S. T. Pantelides

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

9 Citations (Scopus)

53 Downloads (Pure)

Abstract

Self-interstitials in Si are known to migrate athermally at very low temperatures (-4 K). In contrast, at hightemperatures (1100-1600 K), self-diffusion has an activation energy of -5 eV. We describe results of self-consistent Green's-function total energy calculations which, for the first time, provide detailed microscopic understanding of the mechanisms underlying these phenomena and reconcile the contrasting low- and high-temperature data.

Original language	English
Pages (from-to)	401-407
Number of pages	7
Journal	Physica B+C
Volume	127
Issue number	1-3
DOIs	https://doi.org/10.1016/S0378-4363(84)80064-9
Publication status	Published - 1 Jan 1984
Externally published	Yes

Access to Document

10.1016/S0378-4363(84)80064-9

microscopicFinal published version, 402 KB

Cite this

@article{d0a292bcd5ab40fdb66e44cd75b0de8d,

title = "Microscopic theory of atomic diffusion mechanisms in silicon",

abstract = "Self-interstitials in Si are known to migrate athermally at very low temperatures (-4 K). In contrast, at hightemperatures (1100-1600 K), self-diffusion has an activation energy of -5 eV. We describe results of self-consistent Green's-function total energy calculations which, for the first time, provide detailed microscopic understanding of the mechanisms underlying these phenomena and reconcile the contrasting low- and high-temperature data.",

author = "R. Car and Kelly, \{P. J.\} and A. Oshiyama and Pantelides, \{S. T.\}",

year = "1984",

month = jan,

day = "1",

doi = "10.1016/S0378-4363(84)80064-9",

language = "English",

volume = "127",

pages = "401--407",

journal = "Physica B+C",

issn = "0378-4363",

publisher = "North Holland",

number = "1-3",

}

TY - JOUR

T1 - Microscopic theory of atomic diffusion mechanisms in silicon

AU - Car, R.

AU - Kelly, P. J.

AU - Oshiyama, A.

AU - Pantelides, S. T.

PY - 1984/1/1

Y1 - 1984/1/1

N2 - Self-interstitials in Si are known to migrate athermally at very low temperatures (-4 K). In contrast, at hightemperatures (1100-1600 K), self-diffusion has an activation energy of -5 eV. We describe results of self-consistent Green's-function total energy calculations which, for the first time, provide detailed microscopic understanding of the mechanisms underlying these phenomena and reconcile the contrasting low- and high-temperature data.

AB - Self-interstitials in Si are known to migrate athermally at very low temperatures (-4 K). In contrast, at hightemperatures (1100-1600 K), self-diffusion has an activation energy of -5 eV. We describe results of self-consistent Green's-function total energy calculations which, for the first time, provide detailed microscopic understanding of the mechanisms underlying these phenomena and reconcile the contrasting low- and high-temperature data.

UR - https://www.scopus.com/pages/publications/0021611018

U2 - 10.1016/S0378-4363(84)80064-9

DO - 10.1016/S0378-4363(84)80064-9

M3 - Article

AN - SCOPUS:0021611018

SN - 0378-4363

VL - 127

SP - 401

EP - 407

JO - Physica B+C

JF - Physica B+C

IS - 1-3

ER -

Microscopic theory of atomic diffusion mechanisms in silicon

Abstract

Access to Document

Other files and links

Fingerprint

Cite this