Microscopic theory of impurity-defect reactions and impurity diffusion in silicon

Roberto Car*, Paul J. Kelly, Atsushi Oshiyama, Sokrates T. Pantelides

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

122 Citations (Scopus)
36 Downloads (Pure)

Fingerprint Dive into the research topics of 'Microscopic theory of impurity-defect reactions and impurity diffusion in silicon'. Together they form a unique fingerprint.

Physics & Astronomy