Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

D.H. Tong, F.C. Gielens, Johannes G.E. Gardeniers, Henricus V. Jansen, Johan W. Berenschot, Meint J. de Boer, J.H. de Boer, C.J.M. van Rijn, Michael Curt Elwenspoek

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A submicron thick and defect-free palladium-silver (Pd-Ag) alloy membrane is fabricated on a supporting microsieve by using microfabrication techniques. The microfabrication process also creates a robust wafer-scale membrane module, which can easily be inserted into a membrane holder to have gas-tight connections to the outer world. The microfabricated membrane demonstrated high separation fluxes of up to 4 mol H/sub 2//m/sup 2//spl middot/s with a minimal selectivity of 1500 for hydrogen over helium (H/sub 2//He) at 450/spl deg/C and 83 kPa H/sub 2/ retentate pressure. The present membrane has great potential for hydrogen purification and in applications like dehydrogenation chemistry. In addition, the presented technology can be used to fabricate other kinds of ultrathin but strong and defect-free membranes to set up new applications.
Original languageUndefined
Pages (from-to)113-123
Number of pages11
JournalJournal of microelectromechanical systems
Issue number1
Publication statusPublished - Feb 2005


  • EWI-9824
  • IR-51078
  • METIS-224041

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