Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

D.H. Tong; F.C. Gielens; Johannes G.E. Gardeniers; Henricus V. Jansen; Johan W. Berenschot; Meint J. de Boer; J.H. de Boer; C.J.M. van Rijn; Michael Curt Elwenspoek

doi:10.1109/JMEMS.2004.839005

Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

D.H. Tong, F.C. Gielens, Johannes G.E. Gardeniers, Henricus V. Jansen, Johan W. Berenschot, Meint J. de Boer, J.H. de Boer, C.J.M. van Rijn, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

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279 Downloads (Pure)

Abstract

A submicron thick and defect-free palladium-silver (Pd-Ag) alloy membrane is fabricated on a supporting microsieve by using microfabrication techniques. The microfabrication process also creates a robust wafer-scale membrane module, which can easily be inserted into a membrane holder to have gas-tight connections to the outer world. The microfabricated membrane demonstrated high separation fluxes of up to 4 mol H/sub 2//m/sup 2//spl middot/s with a minimal selectivity of 1500 for hydrogen over helium (H/sub 2//He) at 450/spl deg/C and 83 kPa H/sub 2/ retentate pressure. The present membrane has great potential for hydrogen purification and in applications like dehydrogenation chemistry. In addition, the presented technology can be used to fabricate other kinds of ultrathin but strong and defect-free membranes to set up new applications.

Original language	Undefined
Pages (from-to)	113-123
Number of pages	11
Journal	Journal of microelectromechanical systems
Volume	14
Issue number	1
DOIs	https://doi.org/10.1109/JMEMS.2004.839005
Publication status	Published - Feb 2005

Keywords

EWI-9824
IR-51078
METIS-224041

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/JMEMS.2004.839005

01390942

http://eprints.eemcs.utwente.nl/secure2/9824/01/01390942.pdf

Cite this

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title = "Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation",

abstract = "A submicron thick and defect-free palladium-silver (Pd-Ag) alloy membrane is fabricated on a supporting microsieve by using microfabrication techniques. The microfabrication process also creates a robust wafer-scale membrane module, which can easily be inserted into a membrane holder to have gas-tight connections to the outer world. The microfabricated membrane demonstrated high separation fluxes of up to 4 mol H/sub 2//m/sup 2//spl middot/s with a minimal selectivity of 1500 for hydrogen over helium (H/sub 2//He) at 450/spl deg/C and 83 kPa H/sub 2/ retentate pressure. The present membrane has great potential for hydrogen purification and in applications like dehydrogenation chemistry. In addition, the presented technology can be used to fabricate other kinds of ultrathin but strong and defect-free membranes to set up new applications.",

keywords = "EWI-9824, IR-51078, METIS-224041",

author = "D.H. Tong and F.C. Gielens and Gardeniers, {Johannes G.E.} and Jansen, {Henricus V.} and Berenschot, {Johan W.} and {de Boer}, {Meint J.} and {de Boer}, J.H. and {van Rijn}, C.J.M. and Elwenspoek, {Michael Curt}",

year = "2005",

month = feb,

doi = "10.1109/JMEMS.2004.839005",

language = "Undefined",

volume = "14",

pages = "113--123",

journal = "Journal of microelectromechanical systems",

issn = "1057-7157",

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TY - JOUR

T1 - Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

AU - Tong, D.H.

AU - Gielens, F.C.

AU - Gardeniers, Johannes G.E.

AU - Jansen, Henricus V.

AU - Berenschot, Johan W.

AU - de Boer, Meint J.

AU - de Boer, J.H.

AU - van Rijn, C.J.M.

AU - Elwenspoek, Michael Curt

PY - 2005/2

Y1 - 2005/2

N2 - A submicron thick and defect-free palladium-silver (Pd-Ag) alloy membrane is fabricated on a supporting microsieve by using microfabrication techniques. The microfabrication process also creates a robust wafer-scale membrane module, which can easily be inserted into a membrane holder to have gas-tight connections to the outer world. The microfabricated membrane demonstrated high separation fluxes of up to 4 mol H/sub 2//m/sup 2//spl middot/s with a minimal selectivity of 1500 for hydrogen over helium (H/sub 2//He) at 450/spl deg/C and 83 kPa H/sub 2/ retentate pressure. The present membrane has great potential for hydrogen purification and in applications like dehydrogenation chemistry. In addition, the presented technology can be used to fabricate other kinds of ultrathin but strong and defect-free membranes to set up new applications.

AB - A submicron thick and defect-free palladium-silver (Pd-Ag) alloy membrane is fabricated on a supporting microsieve by using microfabrication techniques. The microfabrication process also creates a robust wafer-scale membrane module, which can easily be inserted into a membrane holder to have gas-tight connections to the outer world. The microfabricated membrane demonstrated high separation fluxes of up to 4 mol H/sub 2//m/sup 2//spl middot/s with a minimal selectivity of 1500 for hydrogen over helium (H/sub 2//He) at 450/spl deg/C and 83 kPa H/sub 2/ retentate pressure. The present membrane has great potential for hydrogen purification and in applications like dehydrogenation chemistry. In addition, the presented technology can be used to fabricate other kinds of ultrathin but strong and defect-free membranes to set up new applications.

KW - EWI-9824

KW - IR-51078

KW - METIS-224041

U2 - 10.1109/JMEMS.2004.839005

DO - 10.1109/JMEMS.2004.839005

M3 - Article

SN - 1057-7157

VL - 14

SP - 113

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JO - Journal of microelectromechanical systems

JF - Journal of microelectromechanical systems

IS - 1

ER -