Microsieves made with laser interference lithography for micro filtration applications

C.J.M. van Rijn; W. Nijdam; S. Kuiper; G.J. Veldhuis; Hendricus A.G.M. van Wolferen; Michael Curt Elwenspoek

Microsieves made with laser interference lithography for micro filtration applications

C.J.M. van Rijn, W. Nijdam, S. Kuiper, G.J. Veldhuis, Hendricus A.G.M. van Wolferen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the Micromechanics Europe 1998 Conference (MME)
Place of Publication	Ulvik, Norway
Pages	100-103
Publication status	Published - 3 Jun 1998
Event	9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway Duration: 3 Jun 1998 → 5 Jun 1998 Conference number: 9

Conference

Conference	9th Micromechanics Europe Workshop, MME 1998
Abbreviated title	MME
Country/Territory	Norway
City	Ulvik
Period	3/06/98 → 5/06/98

Keywords

METIS-112903
IR-16021

Cite this

@inproceedings{bdc6ae5d0e09466e9fdfa680b91c5d6a,

title = "Microsieves made with laser interference lithography for micro filtration applications",

keywords = "METIS-112903, IR-16021",

author = "\{van Rijn\}, C.J.M. and W. Nijdam and S. Kuiper and G.J. Veldhuis and \{van Wolferen\}, \{Hendricus A.G.M.\} and Elwenspoek, \{Michael Curt\}",

year = "1998",

month = jun,

day = "3",

language = "Undefined",

pages = "100--103",

booktitle = "Proceedings of the Micromechanics Europe 1998 Conference (MME)",

note = "9th Micromechanics Europe Workshop, MME 1998 ; Conference date: 03-06-1998 Through 05-06-1998",

}

TY - GEN

T1 - Microsieves made with laser interference lithography for micro filtration applications

AU - van Rijn, C.J.M.

AU - Nijdam, W.

AU - Kuiper, S.

AU - Veldhuis, G.J.

AU - van Wolferen, Hendricus A.G.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 9

PY - 1998/6/3

Y1 - 1998/6/3

KW - METIS-112903

KW - IR-16021

M3 - Conference contribution

SP - 100

EP - 103

BT - Proceedings of the Micromechanics Europe 1998 Conference (MME)

CY - Ulvik, Norway

T2 - 9th Micromechanics Europe Workshop, MME 1998

Y2 - 3 June 1998 through 5 June 1998

ER -