Microstructural transformations of ultrathin TiDy/Pd bi-layer films evaporated on Si(100) and quartz induced by vacuum annealing

Enrico G. Keim, W.F. Lisowski, M.A. Smithers

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 19 Oct 2008
Event	55th AVS International Symposium & Exhibition 2008 - Boston, United States Duration: 19 Oct 2008 → 24 Oct 2008 Conference number: 55 http://www2.avs.org/symposium2008/default.asp

Conference	55th AVS International Symposium & Exhibition 2008
Country/Territory	United States
City	Boston
Period	19/10/08 → 24/10/08
Internet address	http://www2.avs.org/symposium2008/default.asp

Keywords

@conference{cb2a935239804a6899d0615453de0de7,

title = "Microstructural transformations of ultrathin TiDy/Pd bi-layer films evaporated on Si(100) and quartz induced by vacuum annealing",

keywords = "METIS-251976",

author = "Keim, {Enrico G.} and W.F. Lisowski and M.A. Smithers",

year = "2008",

month = oct,

day = "19",

language = "Undefined",

pages = "--",

note = "55th AVS International Symposium & Exhibition 2008 ; Conference date: 19-10-2008 Through 24-10-2008",

url = "http://www2.avs.org/symposium2008/default.asp",

}

Microstructural transformations of ultrathin TiDy/Pd bi-layer films evaporated on Si(100) and quartz induced by vacuum annealing. / Keim, Enrico G.; Lisowski, W.F.; Smithers, M.A.
2008. - Poster session presented at 55th AVS International Symposium & Exhibition 2008, Boston, California, United States.

Research output: Contribution to conference › Poster › Other research output

TY - CONF

T1 - Microstructural transformations of ultrathin TiDy/Pd bi-layer films evaporated on Si(100) and quartz induced by vacuum annealing

AU - Keim, Enrico G.

AU - Lisowski, W.F.

AU - Smithers, M.A.

N1 - Conference code: 55

PY - 2008/10/19

Y1 - 2008/10/19

KW - METIS-251976

M3 - Poster

SP - -

T2 - 55th AVS International Symposium & Exhibition 2008

Y2 - 19 October 2008 through 24 October 2008

ER -