Microstructure of pulsed-laser deposited PZT on polished and annealed MGO substrates

S.L. King; L.G. Coccia; Johannes G.E. Gardeniers; I.W. Boyd

Microstructure of pulsed-laser deposited PZT on polished and annealed MGO substrates

S.L. King, L.G. Coccia, Johannes G.E. Gardeniers, I.W. Boyd

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Abstract

Thin films of Lead-Zirconate-Titanate (PZT) have been grown by pulsed-laser-deposition (PLD) onto polished MgO substrates both with and without pre-annealing. The surface morphology of polished MgO substrates, which are widely used for deposition, is examined by AFM. Commercially available, mechanically-polished substrates are shown to be microscopically very rough and seem unlikely to present a surface suitable for the growth of the highest quality thin films. Annealed MgO substrates, on the other hand, comprise atomically flat terraces. The use of annealed substrates is found to enhance considerably the crystalline quality of PZT films deposited thereon.

Original language	English
Pages	157-162
Number of pages	6
Publication status	Published - 7 Apr 1996
Event	MRS Spring Meeting 1996 - San Francisco, United States Duration: 7 Apr 1996 → 12 Apr 1996

Conference

Conference	MRS Spring Meeting 1996
Country/Territory	United States
City	San Francisco
Period	7/04/96 → 12/04/96

Keywords

IR-65037
EWI-13603

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@conference{2e11092b21d74442b6135de9ba51ae31,

title = "Microstructure of pulsed-laser deposited PZT on polished and annealed MGO substrates",

abstract = "Thin films of Lead-Zirconate-Titanate (PZT) have been grown by pulsed-laser-deposition (PLD) onto polished MgO substrates both with and without pre-annealing. The surface morphology of polished MgO substrates, which are widely used for deposition, is examined by AFM. Commercially available, mechanically-polished substrates are shown to be microscopically very rough and seem unlikely to present a surface suitable for the growth of the highest quality thin films. Annealed MgO substrates, on the other hand, comprise atomically flat terraces. The use of annealed substrates is found to enhance considerably the crystalline quality of PZT films deposited thereon.",

keywords = "IR-65037, EWI-13603",

author = "S.L. King and L.G. Coccia and Gardeniers, {Johannes G.E.} and I.W. Boyd",

year = "1996",

month = apr,

day = "7",

language = "English",

pages = "157--162",

note = "MRS Spring Meeting 1996 ; Conference date: 07-04-1996 Through 12-04-1996",

}

TY - CONF

T1 - Microstructure of pulsed-laser deposited PZT on polished and annealed MGO substrates

AU - King, S.L.

AU - Coccia, L.G.

AU - Gardeniers, Johannes G.E.

AU - Boyd, I.W.

PY - 1996/4/7

Y1 - 1996/4/7

N2 - Thin films of Lead-Zirconate-Titanate (PZT) have been grown by pulsed-laser-deposition (PLD) onto polished MgO substrates both with and without pre-annealing. The surface morphology of polished MgO substrates, which are widely used for deposition, is examined by AFM. Commercially available, mechanically-polished substrates are shown to be microscopically very rough and seem unlikely to present a surface suitable for the growth of the highest quality thin films. Annealed MgO substrates, on the other hand, comprise atomically flat terraces. The use of annealed substrates is found to enhance considerably the crystalline quality of PZT films deposited thereon.

AB - Thin films of Lead-Zirconate-Titanate (PZT) have been grown by pulsed-laser-deposition (PLD) onto polished MgO substrates both with and without pre-annealing. The surface morphology of polished MgO substrates, which are widely used for deposition, is examined by AFM. Commercially available, mechanically-polished substrates are shown to be microscopically very rough and seem unlikely to present a surface suitable for the growth of the highest quality thin films. Annealed MgO substrates, on the other hand, comprise atomically flat terraces. The use of annealed substrates is found to enhance considerably the crystalline quality of PZT films deposited thereon.

KW - IR-65037

KW - EWI-13603

M3 - Paper

SP - 157

EP - 162

T2 - MRS Spring Meeting 1996

Y2 - 7 April 1996 through 12 April 1996

ER -

Microstructure of pulsed-laser deposited PZT on polished and annealed MGO substrates

Abstract

Conference

Keywords

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