Microstructuring glass surfaces using a combined masking and microslurry-jet machining process

Yoshitaka Nakanishi*, Yuta Nakashima, Emile van der Heide

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)
112 Downloads (Pure)


The combined application of a conventional photoresist masking process and microslurry-jet (MSJ) mechanical removal process was studied for microstructuring the surface of glass. Masking patterns made of a photocurable resin (SU-8) were created on the glass, and both the SU-8 patterns and exposed glass surface were simultaneously removed using the MSJ. When the sacrificial patterns of the SU-8 were removed by the MSJ, the glass surface with microstructures was created. Post-treatment, such as removal of the SU-8 patterns, was not required. Confocal microscopy results confirmed that continuously curved convex structures up to 30 μm in diameter and 4 μm in height with highly transparent glass surfaces were created. The microstructures reduced the hydrophilicity of the glass surfaces. Future studies on identifying materials compatible with glass for making masking patterns and showing good wear resistance might prove the feasibility of this method in producing structured engineering surfaces.

Original languageEnglish
Pages (from-to)172-177
Number of pages6
JournalPrecision engineering
Early online date28 Sept 2020
Publication statusPublished - Jan 2021


  • Glass
  • Mechanical removal process
  • Micromachining
  • Microslurry-jet
  • Photolithography


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