Microsystem technology: status and infrastructures

J. Elders, V.L. Spiering

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings 1996 National Sensor Conference
    Place of PublicationDelft
    Pages131-134
    Publication statusPublished - 20 Mar 1996

    Keywords

    • METIS-114098

    Cite this

    Elders, J., & Spiering, V. L. (1996). Microsystem technology: status and infrastructures. In Proceedings 1996 National Sensor Conference (pp. 131-134). Delft.
    Elders, J. ; Spiering, V.L. / Microsystem technology: status and infrastructures. Proceedings 1996 National Sensor Conference. Delft, 1996. pp. 131-134
    @inproceedings{bf85cc92f50441de93ac20f2e21ead49,
    title = "Microsystem technology: status and infrastructures",
    keywords = "METIS-114098",
    author = "J. Elders and V.L. Spiering",
    year = "1996",
    month = "3",
    day = "20",
    language = "Undefined",
    pages = "131--134",
    booktitle = "Proceedings 1996 National Sensor Conference",

    }

    Elders, J & Spiering, VL 1996, Microsystem technology: status and infrastructures. in Proceedings 1996 National Sensor Conference. Delft, pp. 131-134.

    Microsystem technology: status and infrastructures. / Elders, J.; Spiering, V.L.

    Proceedings 1996 National Sensor Conference. Delft, 1996. p. 131-134.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Microsystem technology: status and infrastructures

    AU - Elders, J.

    AU - Spiering, V.L.

    PY - 1996/3/20

    Y1 - 1996/3/20

    KW - METIS-114098

    M3 - Conference contribution

    SP - 131

    EP - 134

    BT - Proceedings 1996 National Sensor Conference

    CY - Delft

    ER -

    Elders J, Spiering VL. Microsystem technology: status and infrastructures. In Proceedings 1996 National Sensor Conference. Delft. 1996. p. 131-134