Microsystems technology: Objectives

J.H.J. Fluitman

    Research output: Contribution to journalArticleAcademicpeer-review

    31 Citations (Scopus)
    327 Downloads (Pure)

    Abstract

    This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is. This question is often posed and a simple answer is lacking, as a consequence of the diversity of subjects that are perceived as MST. The second reason is that a map of the somewhat chaotic field of MST is needed to identify sub-territories, for which standardization in terms of system modules and interconnections is feasible. To define the objectives a pragmatic approach has been followed. From the literature a selection of topics has been chosen and collected that are perceived as belonging to the field of MST by a large community of workers in the field (more than 250 references). In this way an overview has been created with `applications' and `generic issues' as the main characteristics.
    Original languageUndefined
    Pages (from-to)151-166
    Number of pages16
    JournalSensors and actuators. A: Physical
    Volume56
    Issue number56
    DOIs
    Publication statusPublished - Aug 1996

    Keywords

    • METIS-111492
    • IR-14210
    • EWI-13602

    Cite this