Precise control of fluid flow becomes increasingly challenging as systems and instruments are scaled down. Smaller dimensions allow smaller flow ranges, but also leave smaller margins for error in performance. Reliable and effective fabrication and assembly procedures are therefore a primary requirement for any microfluidic system, if it is to be successful in real-world applications. This thesis describes the achievements made in ongoing efforts to create miniaturized, proportional control valves for minute gas flows.
|Award date||26 Nov 2015|
|Place of Publication||Enschede|
|Publication status||Published - 26 Nov 2015|