Miniature check valves for high-pressure gas flows

M. van der Wekken, Johannes Faas Burger, Herman J. Holland, Johan W. Berenschot, Meint J. de Boer, Michael Curt Elwenspoek, Hermanus J.M. ter Brake, Horst Rogalla

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 23 Jun 1998

    Keywords

    • METIS-130806

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