Miniature flexure-based goniometer with minimized parasitic motion

Elwin Vree, Hendrik-Marten Meyer, Jan de Jong*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

Precise positioning systems often rely on flexure-based mechanisms. Since flexures move by elastic deformation, they feature zero wear, virtually no hysteresis and potentially higher motion repeatability when compared to conventional bearings. This renders them especially suited for precision applications and for special environments such as ultra-high vacuum. However, limited stroke, loadcapacity and nonlinear geometric behavior over the stroke, termed parasitic motion, make the design of such mechanisms challenging. Therefore, the rotation of existing flexure-based goniometers is restricted to small angles. In this paper, we demonstrate a small-scale goniometer based on a flexure guiding system with low parasitic motion over several degree of rotational motion. By stacking six trapezoidal flexure stages with an alternating orientation, the parasitic motion of the 'face-up' stages is counteracted by the 'face-down' stages leading to a significant reduction of parasitic motion. This butterfly-like structure also reduces the deformation per flexure, allowing for a higher thickness with improved loadability and support stiffness. The final prototype has a range of ±3 deg, a repeatability of 70 μdeg and a parasitic motion of 5.0 μm under a payload of 100 g.

Original languageEnglish
Title of host publicationProceedings of the 23rd international conference of the european society for precision engineering and nanotechnology
EditorsO. Riemer, C. Nisbet, D. Phillips
Place of PublicationCopenhagen, DK
PublisherEUSPEN
Pages245-248
Number of pages4
Edition2023
ISBN (Electronic)978-1-9989991-3-2
Publication statusPublished - 12 Jun 2023
Event23rd EUSPEN International Conference & Exhibition 2023 - Technical University of Denmark, Copenhagen, Denmark
Duration: 12 Jun 202316 Jun 2023
Conference number: 23

Conference

Conference23rd EUSPEN International Conference & Exhibition 2023
Abbreviated titleEUSPEN ICE 2023
Country/TerritoryDenmark
CityCopenhagen
Period12/06/2316/06/23

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