Miniature large range multi-axis force-torque sensor for biomechanical applications

R.A. Brookhuis, R.G.P. Sanders, K. Ma, T.S.J. Lammerink, M.J. de Boer, G.J.M. Krijnen, R.J. Wiegerink

    Research output: Contribution to journalArticleAcademicpeer-review

    13 Citations (Scopus)
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    Abstract

    A miniature force sensor for the measurement of forces and moments at a human fingertip is designed and realized. Thin silicon pillars inside the sensor provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A corrugated silicon ring around the force sensitive area provides the spring constant in shear direction and seals the interior of the sensor. To detect all load components, capacitive read-out is used. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a wide force range of up to 60 N in normal direction, ± 30 N in shear direction and a torque range of ± 25 N mm.

    Original languageEnglish
    Article number025012
    JournalJournal of micromechanics and microengineering
    Volume25
    Issue number2
    DOIs
    Publication statusPublished - 1 Feb 2015

    Keywords

    • Capacitive
    • Force sensor
    • Large range
    • Moment
    • Multi-axis
    • Shear force
    • 2023 OA procedure

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