A miniature force sensor for the measurement of forces and moments at a human fingertip is designed and realized. Thin silicon pillars inside the sensor provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A corrugated silicon ring around the force sensitive area provides the spring constant in shear direction and seals the interior of the sensor. To detect all load components, capacitive read-out is used. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a wide force range of up to 60 N in normal direction, ± 30 N in shear direction and a torque range of ± 25 N mm.
- Force sensor
- Shear force
- large range
Brookhuis, R. A., Sanders, R. G. P., Ma, K., Lammerink, T. S. J., de Boer, M. J., Krijnen, G. J. M., & Wiegerink, R. J. (2015). Miniature large range multi-axis force-torque sensor for biomechanical applications. Journal of micromechanics and microengineering, 25(2), 025012. https://doi.org/10.1088/0960-1317/25/2/025012