Miniature large range multi-axis force-torque sensor for biomechanical applications

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Abstract

A miniature force sensor for the measurement of forces and moments at a human fingertip is designed and realized. Thin silicon pillars inside the sensor provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A corrugated silicon ring around the force sensitive area provides the spring constant in shear direction and seals the interior of the sensor. To detect all load components, capacitive read-out is used. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a wide force range of up to 60 N in normal direction, ± 30 N in shear direction and a torque range of ± 25 N mm.
Original languageUndefined
Pages (from-to)025012
Number of pages16
JournalJournal of micromechanics and microengineering
Volume25
Issue number2
DOIs
Publication statusPublished - 22 Feb 2015

Keywords

  • capacitive
  • Force sensor
  • IR-94023
  • TST-SENSORS
  • METIS-312483
  • moment
  • EWI-25624
  • Shear force
  • large range
  • multi-axis

Cite this

@article{3655a59e40ee449e932a1cc2239d4b13,
title = "Miniature large range multi-axis force-torque sensor for biomechanical applications",
abstract = "A miniature force sensor for the measurement of forces and moments at a human fingertip is designed and realized. Thin silicon pillars inside the sensor provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A corrugated silicon ring around the force sensitive area provides the spring constant in shear direction and seals the interior of the sensor. To detect all load components, capacitive read-out is used. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a wide force range of up to 60 N in normal direction, ± 30 N in shear direction and a torque range of ± 25 N mm.",
keywords = "capacitive, Force sensor, IR-94023, TST-SENSORS, METIS-312483, moment, EWI-25624, Shear force, large range, multi-axis",
author = "Brookhuis, {Robert Anton} and Sanders, {Remco G.P.} and Kechun Ma and Lammerink, {Theodorus S.J.} and {de Boer}, {Meint J.} and Krijnen, {Gijsbertus J.M.} and Wiegerink, {Remco J.}",
note = "eemcs-eprint-25624",
year = "2015",
month = "2",
day = "22",
doi = "10.1088/0960-1317/25/2/025012",
language = "Undefined",
volume = "25",
pages = "025012",
journal = "Journal of micromechanics and microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "2",

}

TY - JOUR

T1 - Miniature large range multi-axis force-torque sensor for biomechanical applications

AU - Brookhuis, Robert Anton

AU - Sanders, Remco G.P.

AU - Ma, Kechun

AU - Lammerink, Theodorus S.J.

AU - de Boer, Meint J.

AU - Krijnen, Gijsbertus J.M.

AU - Wiegerink, Remco J.

N1 - eemcs-eprint-25624

PY - 2015/2/22

Y1 - 2015/2/22

N2 - A miniature force sensor for the measurement of forces and moments at a human fingertip is designed and realized. Thin silicon pillars inside the sensor provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A corrugated silicon ring around the force sensitive area provides the spring constant in shear direction and seals the interior of the sensor. To detect all load components, capacitive read-out is used. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a wide force range of up to 60 N in normal direction, ± 30 N in shear direction and a torque range of ± 25 N mm.

AB - A miniature force sensor for the measurement of forces and moments at a human fingertip is designed and realized. Thin silicon pillars inside the sensor provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A corrugated silicon ring around the force sensitive area provides the spring constant in shear direction and seals the interior of the sensor. To detect all load components, capacitive read-out is used. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a wide force range of up to 60 N in normal direction, ± 30 N in shear direction and a torque range of ± 25 N mm.

KW - capacitive

KW - Force sensor

KW - IR-94023

KW - TST-SENSORS

KW - METIS-312483

KW - moment

KW - EWI-25624

KW - Shear force

KW - large range

KW - multi-axis

U2 - 10.1088/0960-1317/25/2/025012

DO - 10.1088/0960-1317/25/2/025012

M3 - Article

VL - 25

SP - 025012

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

SN - 0960-1317

IS - 2

ER -