Miniature large range multi-axis force-torque sensor for biomechanical applications

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    Abstract

    A miniature force sensor for the measurement of forces and moments at a human fingertip is designed and realized. Thin silicon pillars inside the sensor provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A corrugated silicon ring around the force sensitive area provides the spring constant in shear direction and seals the interior of the sensor. To detect all load components, capacitive read-out is used. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a wide force range of up to 60 N in normal direction, ± 30 N in shear direction and a torque range of ± 25 N mm.
    Original languageUndefined
    Pages (from-to)025012
    Number of pages16
    JournalJournal of micromechanics and microengineering
    Volume25
    Issue number2
    DOIs
    Publication statusPublished - 22 Feb 2015

    Keywords

    • capacitive
    • Force sensor
    • IR-94023
    • TST-SENSORS
    • METIS-312483
    • moment
    • EWI-25624
    • Shear force
    • large range
    • multi-axis

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