Miniature proportional control valve with top-mounted piezo bimorph actuator with millisecond response time

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Abstract

In this paper we demonstrate the realization of a micro control valve with a top-mounted piezoelectric bimorph actuator, to obtain a high-bandwidth proportional control valve for gases in the range of several grams per hour. Dynamic fluidic and mechanical characterization shows that the valve is suitable for high-speed flow control with response times on the order of milliseconds. The microvalve contains an integrated capacitive displacement sensor for position-based control, which can be used to improve the control precision. The microvalve is realized in a straight-forward fabrication process based on a single SOI wafer. A high level of integration of the piezo actuator is achieved using a flexible silicone rubber support between the bimorph and the silicon. This leads to a small volume, high speed device.
Original languageUndefined
Pages (from-to)105008
Number of pages11
JournalJournal of micromechanics and microengineering
Volume25
DOIs
Publication statusPublished - 9 Sep 2015

Keywords

  • EWI-26567
  • IR-98726
  • METIS-315099

Cite this

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title = "Miniature proportional control valve with top-mounted piezo bimorph actuator with millisecond response time",
abstract = "In this paper we demonstrate the realization of a micro control valve with a top-mounted piezoelectric bimorph actuator, to obtain a high-bandwidth proportional control valve for gases in the range of several grams per hour. Dynamic fluidic and mechanical characterization shows that the valve is suitable for high-speed flow control with response times on the order of milliseconds. The microvalve contains an integrated capacitive displacement sensor for position-based control, which can be used to improve the control precision. The microvalve is realized in a straight-forward fabrication process based on a single SOI wafer. A high level of integration of the piezo actuator is achieved using a flexible silicone rubber support between the bimorph and the silicon. This leads to a small volume, high speed device.",
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author = "Maarten Groen and Brouwer, {Dannis Michel} and L{\"o}tters, {Joost Conrad} and Wiegerink, {Remco J.}",
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T1 - Miniature proportional control valve with top-mounted piezo bimorph actuator with millisecond response time

AU - Groen, Maarten

AU - Brouwer, Dannis Michel

AU - Lötters, Joost Conrad

AU - Wiegerink, Remco J.

N1 - eemcs-eprint-26567

PY - 2015/9/9

Y1 - 2015/9/9

N2 - In this paper we demonstrate the realization of a micro control valve with a top-mounted piezoelectric bimorph actuator, to obtain a high-bandwidth proportional control valve for gases in the range of several grams per hour. Dynamic fluidic and mechanical characterization shows that the valve is suitable for high-speed flow control with response times on the order of milliseconds. The microvalve contains an integrated capacitive displacement sensor for position-based control, which can be used to improve the control precision. The microvalve is realized in a straight-forward fabrication process based on a single SOI wafer. A high level of integration of the piezo actuator is achieved using a flexible silicone rubber support between the bimorph and the silicon. This leads to a small volume, high speed device.

AB - In this paper we demonstrate the realization of a micro control valve with a top-mounted piezoelectric bimorph actuator, to obtain a high-bandwidth proportional control valve for gases in the range of several grams per hour. Dynamic fluidic and mechanical characterization shows that the valve is suitable for high-speed flow control with response times on the order of milliseconds. The microvalve contains an integrated capacitive displacement sensor for position-based control, which can be used to improve the control precision. The microvalve is realized in a straight-forward fabrication process based on a single SOI wafer. A high level of integration of the piezo actuator is achieved using a flexible silicone rubber support between the bimorph and the silicon. This leads to a small volume, high speed device.

KW - EWI-26567

KW - IR-98726

KW - METIS-315099

U2 - 10.1088/0960-1317/25/10/105008

DO - 10.1088/0960-1317/25/10/105008

M3 - Article

VL - 25

SP - 105008

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

SN - 0960-1317

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