Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout

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Abstract

For fast and accurate force measurements, e.g., sampling the impact of a liquid droplet, a highly sensitive high-bandwidth force sensor is required. High-sensitivity and high-bandwidth are contradictive specifications in recently published force sensors. The miniature force sensor proposed in this paper uses a novel combination of in-plane sensing, mechanical amplification, and piezoresistive readout that overcomes this contradiction. The straight-forward fabrication process consists of three photomasks and uses a single SOI wafer. The sensor has a proven range of 13 mN, a sensitivity of 1.46 /N and a bandwidth of 75 kHz. This is the first force sensor in this force range with such a large bandwidth and has the potential to open up a new field of force sensing where high sampling rates and low ranges are crucial.
Original languageEnglish
Title of host publication2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Place of PublicationTokyo, Japan
PublisherIEEE
Pages684-687
Number of pages4
ISBN (Electronic)978-1-6654-0911-7
ISBN (Print)978-1-6654-0912-4
DOIs
Publication statusPublished - 11 Feb 2022
Event35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 9 Jan 202213 Jan 2022
Conference number: 35
https://ieeemems2022.org/

Conference

Conference35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Abbreviated titleMEMS 2022
Country/TerritoryJapan
CityTokyo
Period9/01/2213/01/22
Internet address

Keywords

  • Force sensor
  • Load cell
  • Microdroplet
  • Needle-free injector
  • Liquid jets
  • Mechanical amplification.

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