For fast and accurate force measurements, e.g., sampling the impact of a liquid droplet, a highly sensitive high-bandwidth force sensor is required. High-sensitivity and high-bandwidth are contradictive specifications in recently published force sensors. The miniature force sensor proposed in this paper uses a novel combination of in-plane sensing, mechanical amplification, and piezoresistive readout that overcomes this contradiction. The straight-forward fabrication process consists of three photomasks and uses a single SOI wafer. The sensor has a proven range of 13 mN, a sensitivity of 1.46 /N and a bandwidth of 75 kHz. This is the first force sensor in this force range with such a large bandwidth and has the potential to open up a new field of force sensing where high sampling rates and low ranges are crucial.
|Title of host publication||2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)|
|Place of Publication||Tokyo, Japan|
|Number of pages||4|
|Publication status||Published - 11 Feb 2022|
|Event||35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan|
Duration: 9 Jan 2022 → 13 Jan 2022
Conference number: 35
|Conference||35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022|
|Abbreviated title||MEMS 2022|
|Period||9/01/22 → 13/01/22|
- Force sensor
- Load cell
- Needle-free injector
- Liquid jets
- Mechanical amplification.