Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout

Dennis Alveringh; Diana Laura van der Ven; Henk-Willem  Veltkamp; Kevin Michael Batenburg; Remco G.P. Sanders; David Fernandez Rivas; Remco J. Wiegerink

doi:10.1109/MEMS51670.2022.9699639

Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout

Dennis Alveringh, Diana Laura van der Ven, Henk-Willem Veltkamp, Kevin Michael Batenburg, Remco G.P. Sanders, David Fernandez Rivas, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

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Abstract

For fast and accurate force measurements, e.g., sampling the impact of a liquid droplet, a highly sensitive high-bandwidth force sensor is required. High-sensitivity and high-bandwidth are contradictive specifications in recently published force sensors. The miniature force sensor proposed in this paper uses a novel combination of in-plane sensing, mechanical amplification, and piezoresistive readout that overcomes this contradiction. The straight-forward fabrication process consists of three photomasks and uses a single SOI wafer. The sensor has a proven range of 13 mN, a sensitivity of 1.46 /N and a bandwidth of 75 kHz. This is the first force sensor in this force range with such a large bandwidth and has the potential to open up a new field of force sensing where high sampling rates and low ranges are crucial.

Original language	English
Title of host publication	2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Place of Publication	Tokyo, Japan
Publisher	IEEE
Pages	684-687
Number of pages	4
ISBN (Electronic)	978-1-6654-0911-7
ISBN (Print)	978-1-6654-0912-4
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699639
Publication status	Published - 11 Feb 2022
Event	35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022 Conference number: 35 https://ieeemems2022.org/

Conference

Conference	35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Abbreviated title	MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	9/01/22 → 13/01/22
Internet address	https://ieeemems2022.org/

Keywords

Force sensor
Load cell
Microdroplet
Needle-free injector
Liquid jets
Mechanical amplification.

Access to Document

10.1109/MEMS51670.2022.9699639

2021240281Accepted author version, 1.69 MB

Cite this

Alveringh, D., van der Ven, D. L., Veltkamp, H.-W., Batenburg, K. M., Sanders, R. G. P., Fernandez Rivas, D., & Wiegerink, R. J. (2022). Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout. In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE. https://doi.org/10.1109/MEMS51670.2022.9699639

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title = "Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout",

abstract = "For fast and accurate force measurements, e.g., sampling the impact of a liquid droplet, a highly sensitive high-bandwidth force sensor is required. High-sensitivity and high-bandwidth are contradictive specifications in recently published force sensors. The miniature force sensor proposed in this paper uses a novel combination of in-plane sensing, mechanical amplification, and piezoresistive readout that overcomes this contradiction. The straight-forward fabrication process consists of three photomasks and uses a single SOI wafer. The sensor has a proven range of 13 mN, a sensitivity of 1.46 /N and a bandwidth of 75 kHz. This is the first force sensor in this force range with such a large bandwidth and has the potential to open up a new field of force sensing where high sampling rates and low ranges are crucial.",

keywords = "Force sensor, Load cell, Microdroplet, Needle-free injector, Liquid jets, Mechanical amplification.",

author = "Dennis Alveringh and {van der Ven}, {Diana Laura} and Henk-Willem Veltkamp and Batenburg, {Kevin Michael} and Sanders, {Remco G.P.} and {Fernandez Rivas}, David and Wiegerink, {Remco J.}",

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doi = "10.1109/MEMS51670.2022.9699639",

language = "English",

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booktitle = "2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)",

publisher = "IEEE",

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note = "35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

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Alveringh, D, van der Ven, DL, Veltkamp, H-W , Batenburg, KM , Sanders, RGP , Fernandez Rivas, D & Wiegerink, RJ 2022, Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout. in 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). IEEE, Tokyo, Japan, pp. 684-687, 35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699639

Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout. / Alveringh, Dennis; van der Ven, Diana Laura; Veltkamp, Henk-Willem et al.
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). Tokyo, Japan: IEEE, 2022. p. 684-687.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout

AU - Alveringh, Dennis

AU - van der Ven, Diana Laura

AU - Veltkamp, Henk-Willem

AU - Batenburg, Kevin Michael

AU - Sanders, Remco G.P.

AU - Fernandez Rivas, David

AU - Wiegerink, Remco J.

N1 - Conference code: 35

PY - 2022/2/11

Y1 - 2022/2/11

N2 - For fast and accurate force measurements, e.g., sampling the impact of a liquid droplet, a highly sensitive high-bandwidth force sensor is required. High-sensitivity and high-bandwidth are contradictive specifications in recently published force sensors. The miniature force sensor proposed in this paper uses a novel combination of in-plane sensing, mechanical amplification, and piezoresistive readout that overcomes this contradiction. The straight-forward fabrication process consists of three photomasks and uses a single SOI wafer. The sensor has a proven range of 13 mN, a sensitivity of 1.46 /N and a bandwidth of 75 kHz. This is the first force sensor in this force range with such a large bandwidth and has the potential to open up a new field of force sensing where high sampling rates and low ranges are crucial.

AB - For fast and accurate force measurements, e.g., sampling the impact of a liquid droplet, a highly sensitive high-bandwidth force sensor is required. High-sensitivity and high-bandwidth are contradictive specifications in recently published force sensors. The miniature force sensor proposed in this paper uses a novel combination of in-plane sensing, mechanical amplification, and piezoresistive readout that overcomes this contradiction. The straight-forward fabrication process consists of three photomasks and uses a single SOI wafer. The sensor has a proven range of 13 mN, a sensitivity of 1.46 /N and a bandwidth of 75 kHz. This is the first force sensor in this force range with such a large bandwidth and has the potential to open up a new field of force sensing where high sampling rates and low ranges are crucial.

KW - Force sensor

KW - Load cell

KW - Microdroplet

KW - Needle-free injector

KW - Liquid jets

KW - Mechanical amplification.

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DO - 10.1109/MEMS51670.2022.9699639

M3 - Conference contribution

SN - 978-1-6654-0912-4

SP - 684

EP - 687

BT - 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

PB - IEEE

CY - Tokyo, Japan

T2 - 35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

Y2 - 9 January 2022 through 13 January 2022

ER -

Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout

Abstract

Conference

Keywords

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