Miniaturised friction force measuring system for tribological research on magnetic storage devices

Johannes F. Burger; Gert-Jan Burger; Theo S.J. Lammerink; Satomitsu Imai; Jan H.J. Fluitman

doi:10.1109/MEMSYS.1996.493836

Miniaturised friction force measuring system for tribological research on magnetic storage devices

Johannes F. Burger, Gert-Jan Burger, Theo S.J. Lammerink, Satomitsu Imai, Jan H.J. Fluitman

Research output: Contribution to conference › Paper › peer-review

6 Citations (Scopus)

8 Downloads (Pure)

Abstract

In this paper a silicon head slider suspension with integrated piezoresistive friction force sensors is presented. This device can be used for tribological research on magnetic rigid disk storage devices. Both the tangential and radial friction forces between the slider and disk, as well as a friction induced moment, can be measured simultaneously. Furthermore the normal load on the head slider can be measured. The paper focusses on design considerations and the realisation process of the suspension. Friction measurements are included to illustrate the feasibility of the system.

Original language	English
Pages	99-104
Number of pages	6
DOIs	https://doi.org/10.1109/MEMSYS.1996.493836
Publication status	Published - 11 Feb 1996
Event	9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996 - San Diego, United States Duration: 11 Feb 1996 → 15 Feb 1996 Conference number: 9

Workshop

Workshop	9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996
Abbreviated title	MEMS
Country/Territory	United States
City	San Diego
Period	11/02/96 → 15/02/96

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10.1109/MEMSYS.1996.493836

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Burger, J. F., Burger, G.-J., Lammerink, T. S. J., Imai, S., & Fluitman, J. H. J. (1996). Miniaturised friction force measuring system for tribological research on magnetic storage devices. 99-104. Paper presented at 9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996, San Diego, California, United States. https://doi.org/10.1109/MEMSYS.1996.493836

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title = "Miniaturised friction force measuring system for tribological research on magnetic storage devices",

abstract = "In this paper a silicon head slider suspension with integrated piezoresistive friction force sensors is presented. This device can be used for tribological research on magnetic rigid disk storage devices. Both the tangential and radial friction forces between the slider and disk, as well as a friction induced moment, can be measured simultaneously. Furthermore the normal load on the head slider can be measured. The paper focusses on design considerations and the realisation process of the suspension. Friction measurements are included to illustrate the feasibility of the system.",

author = "Burger, {Johannes F.} and Gert-Jan Burger and Lammerink, {Theo S.J.} and Satomitsu Imai and Fluitman, {Jan H.J.}",

year = "1996",

month = feb,

day = "11",

doi = "10.1109/MEMSYS.1996.493836",

language = "English",

pages = "99--104",

note = "9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996, MEMS ; Conference date: 11-02-1996 Through 15-02-1996",

}

Burger, JF, Burger, G-J, Lammerink, TSJ, Imai, S & Fluitman, JHJ 1996, 'Miniaturised friction force measuring system for tribological research on magnetic storage devices', Paper presented at 9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996, San Diego, United States, 11/02/96 - 15/02/96 pp. 99-104. https://doi.org/10.1109/MEMSYS.1996.493836

Miniaturised friction force measuring system for tribological research on magnetic storage devices. / Burger, Johannes F.; Burger, Gert-Jan; Lammerink, Theo S.J. et al.
1996. 99-104 Paper presented at 9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996, San Diego, California, United States.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Miniaturised friction force measuring system for tribological research on magnetic storage devices

AU - Burger, Johannes F.

AU - Burger, Gert-Jan

AU - Lammerink, Theo S.J.

AU - Imai, Satomitsu

AU - Fluitman, Jan H.J.

N1 - Conference code: 9

PY - 1996/2/11

Y1 - 1996/2/11

N2 - In this paper a silicon head slider suspension with integrated piezoresistive friction force sensors is presented. This device can be used for tribological research on magnetic rigid disk storage devices. Both the tangential and radial friction forces between the slider and disk, as well as a friction induced moment, can be measured simultaneously. Furthermore the normal load on the head slider can be measured. The paper focusses on design considerations and the realisation process of the suspension. Friction measurements are included to illustrate the feasibility of the system.

AB - In this paper a silicon head slider suspension with integrated piezoresistive friction force sensors is presented. This device can be used for tribological research on magnetic rigid disk storage devices. Both the tangential and radial friction forces between the slider and disk, as well as a friction induced moment, can be measured simultaneously. Furthermore the normal load on the head slider can be measured. The paper focusses on design considerations and the realisation process of the suspension. Friction measurements are included to illustrate the feasibility of the system.

U2 - 10.1109/MEMSYS.1996.493836

DO - 10.1109/MEMSYS.1996.493836

M3 - Paper

SP - 99

EP - 104

T2 - 9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996

Y2 - 11 February 1996 through 15 February 1996

ER -

Miniaturised friction force measuring system for tribological research on magnetic storage devices

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Workshop

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