Miniaturised friction force measuring system for tribological research on magnetic storage devices

Johannes F. Burger, Gert-Jan Burger, Theo S.J. Lammerink, Satomitsu Imai, Jan H.J. Fluitman

Research output: Contribution to conferencePaper

6 Citations (Scopus)
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Abstract

In this paper a silicon head slider suspension with integrated piezoresistive friction force sensors is presented. This device can be used for tribological research on magnetic rigid disk storage devices. Both the tangential and radial friction forces between the slider and disk, as well as a friction induced moment, can be measured simultaneously. Furthermore the normal load on the head slider can be measured. The paper focusses on design considerations and the realisation process of the suspension. Friction measurements are included to illustrate the feasibility of the system.
Original languageEnglish
Pages99-104
Number of pages6
DOIs
Publication statusPublished - 11 Feb 1996
Event9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996 - San Diego, United States
Duration: 11 Feb 199615 Feb 1996
Conference number: 9

Workshop

Workshop9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996
Abbreviated titleMEMS
CountryUnited States
CitySan Diego
Period11/02/9615/02/96

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Burger, J. F., Burger, G-J., Lammerink, T. S. J., Imai, S., & Fluitman, J. H. J. (1996). Miniaturised friction force measuring system for tribological research on magnetic storage devices. 99-104. Paper presented at 9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996, San Diego, United States. https://doi.org/10.1109/MEMSYS.1996.493836