Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation

Marcel Dijkstra, Kechun Ma, Meint J. de Boer, Jarno Groenesteijn, Joost Conrad Lötters, Remco J. Wiegerink

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)

    Abstract

    A miniaturised Prandtl-tube sensor incorporating a 6 mm long 40 μm diameter microchannel with integrated pressure sensors has been realised. The sensor has been designed for the characterisation of rarefied plume flow from a MEMS-based monopropellant propulsion system for high-accuracy attitude control of satellites. The 4.5 × 2.5 mm sensor chip incorporates 400 mbar full-scale capacitive pressure sensors. The capacitive pressure transducer is created by merging several microchannels into a rectangular pressure membrane, with outward-facing comb-fingers hinging on the microchannel sidewall. Additionally, thermistors can measure the temperature profile on the Prandtl tube and an integrated Pirani sensor can optionally measure vacuum pressures below 10 mbar. An electronics board and stainless steel probe, from which only the Prandtl tube protrudes has been realised. Initial plume measurements of dynamic pressure on the Prandtl tube have been obtained by flowing air from a metal tube with 0.7 mm diameter, demonstrating the feasibility of the miniaturised Prandtl-tube sensor.
    Original languageUndefined
    Title of host publicationMIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014
    Place of PublicationUSA
    PublisherIEEE
    Pages999-1002
    Number of pages4
    ISBN (Print)978-1-4799-3508-6
    DOIs
    Publication statusPublished - 26 Jan 2014
    Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, United States
    Duration: 26 Jan 201430 Jan 2014
    Conference number: 27

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
    Abbreviated titleMEMS
    CountryUnited States
    CitySan Francisco
    Period26/01/1430/01/14

    Keywords

    • EWI-25636
    • IR-94233
    • METIS-309855

    Cite this

    Dijkstra, M., Ma, K., de Boer, M. J., Groenesteijn, J., Lötters, J. C., & Wiegerink, R. J. (2014). Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation. In MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014 (pp. 999-1002). USA: IEEE. https://doi.org/10.1109/MEMSYS.2014.6765812