Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation

Marcel Dijkstra; Kechun Ma; Meint J. de Boer; Jarno Groenesteijn; Joost Conrad Lötters; Remco J. Wiegerink

doi:10.1109/MEMSYS.2014.6765812

Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation

Marcel Dijkstra, Kechun Ma, Meint J. de Boer, Jarno Groenesteijn, Joost Conrad Lötters, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

Abstract

A miniaturised Prandtl-tube sensor incorporating a 6 mm long 40 μm diameter microchannel with integrated pressure sensors has been realised. The sensor has been designed for the characterisation of rarefied plume flow from a MEMS-based monopropellant propulsion system for high-accuracy attitude control of satellites. The 4.5 × 2.5 mm sensor chip incorporates 400 mbar full-scale capacitive pressure sensors. The capacitive pressure transducer is created by merging several microchannels into a rectangular pressure membrane, with outward-facing comb-fingers hinging on the microchannel sidewall. Additionally, thermistors can measure the temperature profile on the Prandtl tube and an integrated Pirani sensor can optionally measure vacuum pressures below 10 mbar. An electronics board and stainless steel probe, from which only the Prandtl tube protrudes has been realised. Initial plume measurements of dynamic pressure on the Prandtl tube have been obtained by flowing air from a metal tube with 0.7 mm diameter, demonstrating the feasibility of the miniaturised Prandtl-tube sensor.

Original language	Undefined
Title of host publication	MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014
Place of Publication	USA
Publisher	IEEE
Pages	999-1002
Number of pages	4
ISBN (Print)	978-1-4799-3508-6
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765812
Publication status	Published - 26 Jan 2014
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, United States Duration: 26 Jan 2014 → 30 Jan 2014 Conference number: 27

Publication series

Name
Publisher	IEEE

Conference

Conference	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Abbreviated title	MEMS
Country/Territory	United States
City	San Francisco
Period	26/01/14 → 30/01/14

Keywords

EWI-25636
IR-94233
METIS-309855

Access to Document

10.1109/MEMSYS.2014.6765812

http://eprints.eemcs.utwente.nl/secure2/25636/01/Dijkstra_MEMS_2014.pdf

Cite this

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title = "Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation",

abstract = "A miniaturised Prandtl-tube sensor incorporating a 6 mm long 40 μm diameter microchannel with integrated pressure sensors has been realised. The sensor has been designed for the characterisation of rarefied plume flow from a MEMS-based monopropellant propulsion system for high-accuracy attitude control of satellites. The 4.5 × 2.5 mm sensor chip incorporates 400 mbar full-scale capacitive pressure sensors. The capacitive pressure transducer is created by merging several microchannels into a rectangular pressure membrane, with outward-facing comb-fingers hinging on the microchannel sidewall. Additionally, thermistors can measure the temperature profile on the Prandtl tube and an integrated Pirani sensor can optionally measure vacuum pressures below 10 mbar. An electronics board and stainless steel probe, from which only the Prandtl tube protrudes has been realised. Initial plume measurements of dynamic pressure on the Prandtl tube have been obtained by flowing air from a metal tube with 0.7 mm diameter, demonstrating the feasibility of the miniaturised Prandtl-tube sensor.",

keywords = "EWI-25636, IR-94233, METIS-309855",

author = "Marcel Dijkstra and Kechun Ma and {de Boer}, {Meint J.} and Jarno Groenesteijn and L{\"o}tters, {Joost Conrad} and Wiegerink, {Remco J.}",

note = "10.1109/MEMSYS.2014.6765812 ; 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 ; Conference date: 26-01-2014 Through 30-01-2014",

year = "2014",

month = jan,

day = "26",

doi = "10.1109/MEMSYS.2014.6765812",

language = "Undefined",

isbn = "978-1-4799-3508-6",

publisher = "IEEE",

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booktitle = "MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014",

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Dijkstra, M, Ma, K, de Boer, MJ, Groenesteijn, J , Lötters, JC & Wiegerink, RJ 2014, Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation. in MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014. IEEE, USA, pp. 999-1002, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, California, United States, 26/01/14. https://doi.org/10.1109/MEMSYS.2014.6765812

Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation. / Dijkstra, Marcel; Ma, Kechun; de Boer, Meint J. et al.
MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA: IEEE, 2014. p. 999-1002.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Lötters, Joost Conrad

AU - Wiegerink, Remco J.

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N2 - A miniaturised Prandtl-tube sensor incorporating a 6 mm long 40 μm diameter microchannel with integrated pressure sensors has been realised. The sensor has been designed for the characterisation of rarefied plume flow from a MEMS-based monopropellant propulsion system for high-accuracy attitude control of satellites. The 4.5 × 2.5 mm sensor chip incorporates 400 mbar full-scale capacitive pressure sensors. The capacitive pressure transducer is created by merging several microchannels into a rectangular pressure membrane, with outward-facing comb-fingers hinging on the microchannel sidewall. Additionally, thermistors can measure the temperature profile on the Prandtl tube and an integrated Pirani sensor can optionally measure vacuum pressures below 10 mbar. An electronics board and stainless steel probe, from which only the Prandtl tube protrudes has been realised. Initial plume measurements of dynamic pressure on the Prandtl tube have been obtained by flowing air from a metal tube with 0.7 mm diameter, demonstrating the feasibility of the miniaturised Prandtl-tube sensor.

AB - A miniaturised Prandtl-tube sensor incorporating a 6 mm long 40 μm diameter microchannel with integrated pressure sensors has been realised. The sensor has been designed for the characterisation of rarefied plume flow from a MEMS-based monopropellant propulsion system for high-accuracy attitude control of satellites. The 4.5 × 2.5 mm sensor chip incorporates 400 mbar full-scale capacitive pressure sensors. The capacitive pressure transducer is created by merging several microchannels into a rectangular pressure membrane, with outward-facing comb-fingers hinging on the microchannel sidewall. Additionally, thermistors can measure the temperature profile on the Prandtl tube and an integrated Pirani sensor can optionally measure vacuum pressures below 10 mbar. An electronics board and stainless steel probe, from which only the Prandtl tube protrudes has been realised. Initial plume measurements of dynamic pressure on the Prandtl tube have been obtained by flowing air from a metal tube with 0.7 mm diameter, demonstrating the feasibility of the miniaturised Prandtl-tube sensor.

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