Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation

Marcel Dijkstra, Kechun Ma, Meint J. de Boer, Jarno Groenesteijn, Joost Conrad Lötters, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

A miniaturised Prandtl-tube sensor incorporating a 6 mm long 40 μm diameter microchannel with integrated pressure sensors has been realised. The sensor has been designed for the characterisation of rarefied plume flow from a MEMS-based monopropellant propulsion system for high-accuracy attitude control of satellites. The 4.5 × 2.5 mm sensor chip incorporates 400 mbar full-scale capacitive pressure sensors. The capacitive pressure transducer is created by merging several microchannels into a rectangular pressure membrane, with outward-facing comb-fingers hinging on the microchannel sidewall. Additionally, thermistors can measure the temperature profile on the Prandtl tube and an integrated Pirani sensor can optionally measure vacuum pressures below 10 mbar. An electronics board and stainless steel probe, from which only the Prandtl tube protrudes has been realised. Initial plume measurements of dynamic pressure on the Prandtl tube have been obtained by flowing air from a metal tube with 0.7 mm diameter, demonstrating the feasibility of the miniaturised Prandtl-tube sensor.
Original languageUndefined
Title of host publicationMIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014
Place of PublicationUSA
PublisherIEEE
Pages999-1002
Number of pages4
ISBN (Print)978-1-4799-3508-6
DOIs
Publication statusPublished - 26 Jan 2014
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, United States
Duration: 26 Jan 201430 Jan 2014
Conference number: 27

Publication series

Name
PublisherIEEE

Conference

Conference27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Abbreviated titleMEMS
CountryUnited States
CitySan Francisco
Period26/01/1430/01/14

Keywords

  • EWI-25636
  • IR-94233
  • METIS-309855

Cite this

Dijkstra, M., Ma, K., de Boer, M. J., Groenesteijn, J., Lötters, J. C., & Wiegerink, R. J. (2014). Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation. In MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014 (pp. 999-1002). USA: IEEE. https://doi.org/10.1109/MEMSYS.2014.6765812
Dijkstra, Marcel ; Ma, Kechun ; de Boer, Meint J. ; Groenesteijn, Jarno ; Lötters, Joost Conrad ; Wiegerink, Remco J. / Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation. MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA : IEEE, 2014. pp. 999-1002
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title = "Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation",
abstract = "A miniaturised Prandtl-tube sensor incorporating a 6 mm long 40 μm diameter microchannel with integrated pressure sensors has been realised. The sensor has been designed for the characterisation of rarefied plume flow from a MEMS-based monopropellant propulsion system for high-accuracy attitude control of satellites. The 4.5 × 2.5 mm sensor chip incorporates 400 mbar full-scale capacitive pressure sensors. The capacitive pressure transducer is created by merging several microchannels into a rectangular pressure membrane, with outward-facing comb-fingers hinging on the microchannel sidewall. Additionally, thermistors can measure the temperature profile on the Prandtl tube and an integrated Pirani sensor can optionally measure vacuum pressures below 10 mbar. An electronics board and stainless steel probe, from which only the Prandtl tube protrudes has been realised. Initial plume measurements of dynamic pressure on the Prandtl tube have been obtained by flowing air from a metal tube with 0.7 mm diameter, demonstrating the feasibility of the miniaturised Prandtl-tube sensor.",
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author = "Marcel Dijkstra and Kechun Ma and {de Boer}, {Meint J.} and Jarno Groenesteijn and L{\"o}tters, {Joost Conrad} and Wiegerink, {Remco J.}",
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year = "2014",
month = "1",
day = "26",
doi = "10.1109/MEMSYS.2014.6765812",
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Dijkstra, M, Ma, K, de Boer, MJ, Groenesteijn, J, Lötters, JC & Wiegerink, RJ 2014, Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation. in MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014. IEEE, USA, pp. 999-1002, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, United States, 26/01/14. https://doi.org/10.1109/MEMSYS.2014.6765812

Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation. / Dijkstra, Marcel; Ma, Kechun; de Boer, Meint J.; Groenesteijn, Jarno; Lötters, Joost Conrad; Wiegerink, Remco J.

MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA : IEEE, 2014. p. 999-1002.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation

AU - Dijkstra, Marcel

AU - Ma, Kechun

AU - de Boer, Meint J.

AU - Groenesteijn, Jarno

AU - Lötters, Joost Conrad

AU - Wiegerink, Remco J.

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N2 - A miniaturised Prandtl-tube sensor incorporating a 6 mm long 40 μm diameter microchannel with integrated pressure sensors has been realised. The sensor has been designed for the characterisation of rarefied plume flow from a MEMS-based monopropellant propulsion system for high-accuracy attitude control of satellites. The 4.5 × 2.5 mm sensor chip incorporates 400 mbar full-scale capacitive pressure sensors. The capacitive pressure transducer is created by merging several microchannels into a rectangular pressure membrane, with outward-facing comb-fingers hinging on the microchannel sidewall. Additionally, thermistors can measure the temperature profile on the Prandtl tube and an integrated Pirani sensor can optionally measure vacuum pressures below 10 mbar. An electronics board and stainless steel probe, from which only the Prandtl tube protrudes has been realised. Initial plume measurements of dynamic pressure on the Prandtl tube have been obtained by flowing air from a metal tube with 0.7 mm diameter, demonstrating the feasibility of the miniaturised Prandtl-tube sensor.

AB - A miniaturised Prandtl-tube sensor incorporating a 6 mm long 40 μm diameter microchannel with integrated pressure sensors has been realised. The sensor has been designed for the characterisation of rarefied plume flow from a MEMS-based monopropellant propulsion system for high-accuracy attitude control of satellites. The 4.5 × 2.5 mm sensor chip incorporates 400 mbar full-scale capacitive pressure sensors. The capacitive pressure transducer is created by merging several microchannels into a rectangular pressure membrane, with outward-facing comb-fingers hinging on the microchannel sidewall. Additionally, thermistors can measure the temperature profile on the Prandtl tube and an integrated Pirani sensor can optionally measure vacuum pressures below 10 mbar. An electronics board and stainless steel probe, from which only the Prandtl tube protrudes has been realised. Initial plume measurements of dynamic pressure on the Prandtl tube have been obtained by flowing air from a metal tube with 0.7 mm diameter, demonstrating the feasibility of the miniaturised Prandtl-tube sensor.

KW - EWI-25636

KW - IR-94233

KW - METIS-309855

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BT - MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014

PB - IEEE

CY - USA

ER -

Dijkstra M, Ma K, de Boer MJ, Groenesteijn J, Lötters JC, Wiegerink RJ. Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation. In MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA: IEEE. 2014. p. 999-1002 https://doi.org/10.1109/MEMSYS.2014.6765812