Miniaturization of a micro coriolis mass flow sensor with lorentz actuation

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Abstract

In this paper we present a significant reduction in size of a micromachined Coriolis mass flow sensor without sacrificing resolution or range. The sensor has a flow range from 10 mg/h up to more than 1000 mg/h, which is equivalent to 10 ul/h to 1 ml/h water. The reduction is achieved by using a more localized magnetic field for the actuation of the sensor.
Original languageUndefined
Title of host publicationProceedings of Micromechanics and Micro systems Europe Workshop, MME2011
Place of PublicationToensberg, Norway
PublisherMicromechanics and Micro systems Europe
Pages1-4
Number of pages4
ISBN (Print)978-82-7860-224-9
Publication statusPublished - 19 Jun 2011
Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway
Duration: 19 Jun 201122 Jun 2011
Conference number: 22

Publication series

Name
PublisherMicromechanics and Micro systems Europe

Conference

Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011
Abbreviated titleMME
CountryNorway
CityTønsberg
Period19/06/1122/06/11

Keywords

  • METIS-285034
  • EWI-21336
  • IR-79451

Cite this

Groenesteijn, J., Lammerink, T. S. J., Lötters, J. C., Haneveld, J., & Wiegerink, R. J. (2011). Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. In Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011 (pp. 1-4). Toensberg, Norway: Micromechanics and Micro systems Europe.
Groenesteijn, Jarno ; Lammerink, Theodorus S.J. ; Lötters, Joost Conrad ; Haneveld, J. ; Wiegerink, Remco J. / Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011. Toensberg, Norway : Micromechanics and Micro systems Europe, 2011. pp. 1-4
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title = "Miniaturization of a micro coriolis mass flow sensor with lorentz actuation",
abstract = "In this paper we present a significant reduction in size of a micromachined Coriolis mass flow sensor without sacrificing resolution or range. The sensor has a flow range from 10 mg/h up to more than 1000 mg/h, which is equivalent to 10 ul/h to 1 ml/h water. The reduction is achieved by using a more localized magnetic field for the actuation of the sensor.",
keywords = "METIS-285034, EWI-21336, IR-79451",
author = "Jarno Groenesteijn and Lammerink, {Theodorus S.J.} and L{\"o}tters, {Joost Conrad} and J. Haneveld and Wiegerink, {Remco J.}",
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Groenesteijn, J, Lammerink, TSJ, Lötters, JC, Haneveld, J & Wiegerink, RJ 2011, Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. in Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011. Micromechanics and Micro systems Europe, Toensberg, Norway, pp. 1-4, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tønsberg, Norway, 19/06/11.

Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. / Groenesteijn, Jarno; Lammerink, Theodorus S.J.; Lötters, Joost Conrad; Haneveld, J.; Wiegerink, Remco J.

Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011. Toensberg, Norway : Micromechanics and Micro systems Europe, 2011. p. 1-4.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Miniaturization of a micro coriolis mass flow sensor with lorentz actuation

AU - Groenesteijn, Jarno

AU - Lammerink, Theodorus S.J.

AU - Lötters, Joost Conrad

AU - Haneveld, J.

AU - Wiegerink, Remco J.

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PY - 2011/6/19

Y1 - 2011/6/19

N2 - In this paper we present a significant reduction in size of a micromachined Coriolis mass flow sensor without sacrificing resolution or range. The sensor has a flow range from 10 mg/h up to more than 1000 mg/h, which is equivalent to 10 ul/h to 1 ml/h water. The reduction is achieved by using a more localized magnetic field for the actuation of the sensor.

AB - In this paper we present a significant reduction in size of a micromachined Coriolis mass flow sensor without sacrificing resolution or range. The sensor has a flow range from 10 mg/h up to more than 1000 mg/h, which is equivalent to 10 ul/h to 1 ml/h water. The reduction is achieved by using a more localized magnetic field for the actuation of the sensor.

KW - METIS-285034

KW - EWI-21336

KW - IR-79451

M3 - Conference contribution

SN - 978-82-7860-224-9

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EP - 4

BT - Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011

PB - Micromechanics and Micro systems Europe

CY - Toensberg, Norway

ER -

Groenesteijn J, Lammerink TSJ, Lötters JC, Haneveld J, Wiegerink RJ. Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. In Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011. Toensberg, Norway: Micromechanics and Micro systems Europe. 2011. p. 1-4