Miniaturization of a micro coriolis mass flow sensor with lorentz actuation

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    Abstract

    In this paper we present a significant reduction in size of a micromachined Coriolis mass flow sensor without sacrificing resolution or range. The sensor has a flow range from 10 mg/h up to more than 1000 mg/h, which is equivalent to 10 ul/h to 1 ml/h water. The reduction is achieved by using a more localized magnetic field for the actuation of the sensor.
    Original languageUndefined
    Title of host publicationProceedings of Micromechanics and Micro systems Europe Workshop, MME2011
    Place of PublicationToensberg, Norway
    PublisherMicromechanics and Micro systems Europe
    Pages1-4
    Number of pages4
    ISBN (Print)978-82-7860-224-9
    Publication statusPublished - 19 Jun 2011
    Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway
    Duration: 19 Jun 201122 Jun 2011
    Conference number: 22

    Publication series

    Name
    PublisherMicromechanics and Micro systems Europe

    Conference

    Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011
    Abbreviated titleMME
    CountryNorway
    CityTønsberg
    Period19/06/1122/06/11

    Keywords

    • METIS-285034
    • EWI-21336
    • IR-79451

    Cite this

    Groenesteijn, J., Lammerink, T. S. J., Lötters, J. C., Haneveld, J., & Wiegerink, R. J. (2011). Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. In Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011 (pp. 1-4). Toensberg, Norway: Micromechanics and Micro systems Europe.