Miniaturization of a micro coriolis mass flow sensor with lorentz actuation

Jarno Groenesteijn; Theodorus S.J. Lammerink; Joost Conrad Lötters; J. Haneveld; Remco J. Wiegerink

Miniaturization of a micro coriolis mass flow sensor with lorentz actuation

Jarno Groenesteijn
, Theodorus S.J. Lammerink
, Joost Conrad Lötters
, J. Haneveld
, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

113 Downloads (Pure)

Abstract

In this paper we present a significant reduction in size of a micromachined Coriolis mass flow sensor without sacrificing resolution or range. The sensor has a flow range from 10 mg/h up to more than 1000 mg/h, which is equivalent to 10 ul/h to 1 ml/h water. The reduction is achieved by using a more localized magnetic field for the actuation of the sensor.

Original language	Undefined
Title of host publication	Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011
Place of Publication	Toensberg, Norway
Publisher	Micromechanics and Micro systems Europe
Pages	1-4
Number of pages	4
ISBN (Print)	978-82-7860-224-9
Publication status	Published - 19 Jun 2011
Event	22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway Duration: 19 Jun 2011 → 22 Jun 2011 Conference number: 22

Publication series

Name
Publisher	Micromechanics and Micro systems Europe

Conference

Conference	22nd Micromechanics and Microsystems Europe Workshop, MME 2011
Abbreviated title	MME
Country/Territory	Norway
City	Tønsberg
Period	19/06/11 → 22/06/11

Keywords

METIS-285034
EWI-21336
IR-79451

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Cite this

@inproceedings{ea45cfd97d83401596d5eccdd1771946,

title = "Miniaturization of a micro coriolis mass flow sensor with lorentz actuation",

abstract = "In this paper we present a significant reduction in size of a micromachined Coriolis mass flow sensor without sacrificing resolution or range. The sensor has a flow range from 10 mg/h up to more than 1000 mg/h, which is equivalent to 10 ul/h to 1 ml/h water. The reduction is achieved by using a more localized magnetic field for the actuation of the sensor.",

keywords = "METIS-285034, EWI-21336, IR-79451",

author = "Jarno Groenesteijn and Lammerink, \{Theodorus S.J.\} and L{\"o}tters, \{Joost Conrad\} and J. Haneveld and Wiegerink, \{Remco J.\}",

note = "http://www.mme2011.org/MME2011\_Proceedings.pdf; 22nd Micromechanics and Microsystems Europe Workshop, MME 2011 ; Conference date: 19-06-2011 Through 22-06-2011",

year = "2011",

month = jun,

day = "19",

language = "Undefined",

isbn = "978-82-7860-224-9",

publisher = "Micromechanics and Micro systems Europe",

pages = "1--4",

booktitle = "Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011",

}

Groenesteijn, J, Lammerink, TSJ, Lötters, JC, Haneveld, J & Wiegerink, RJ 2011, Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. in Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011. Micromechanics and Micro systems Europe, Toensberg, Norway, pp. 1-4, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tønsberg, Norway, 19/06/11.

Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. / Groenesteijn, Jarno; Lammerink, Theodorus S.J.; Lötters, Joost Conrad et al.
Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011. Toensberg, Norway: Micromechanics and Micro systems Europe, 2011. p. 1-4.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Miniaturization of a micro coriolis mass flow sensor with lorentz actuation

AU - Groenesteijn, Jarno

AU - Lammerink, Theodorus S.J.

AU - Lötters, Joost Conrad

AU - Haneveld, J.

AU - Wiegerink, Remco J.

N1 - Conference code: 22

PY - 2011/6/19

Y1 - 2011/6/19

N2 - In this paper we present a significant reduction in size of a micromachined Coriolis mass flow sensor without sacrificing resolution or range. The sensor has a flow range from 10 mg/h up to more than 1000 mg/h, which is equivalent to 10 ul/h to 1 ml/h water. The reduction is achieved by using a more localized magnetic field for the actuation of the sensor.

AB - In this paper we present a significant reduction in size of a micromachined Coriolis mass flow sensor without sacrificing resolution or range. The sensor has a flow range from 10 mg/h up to more than 1000 mg/h, which is equivalent to 10 ul/h to 1 ml/h water. The reduction is achieved by using a more localized magnetic field for the actuation of the sensor.

KW - METIS-285034

KW - EWI-21336

KW - IR-79451

M3 - Conference contribution

SN - 978-82-7860-224-9

SP - 1

EP - 4

BT - Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011

PB - Micromechanics and Micro systems Europe

CY - Toensberg, Norway

T2 - 22nd Micromechanics and Microsystems Europe Workshop, MME 2011

Y2 - 19 June 2011 through 22 June 2011

ER -