Miniaturized chemical analysis systems

Albert van den Berg, Piet Bergveld, David Reinhoudt, Michael Curt Elwenspoek, J.H.J. Fluitman

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    Abstract

    A new concept for miniaturised analysis systems, based on a modular assembly of silicon system components on a anodically bonded base plate containing fluid channels, is presented. The proposed configuration allows the separate development of the different system elements as well as an easy modification of the system setup. Besides micropumps and flow-sensors, for detection, different ISFET-based chemical sensors for cations are presented. Using covalent attachment of all membrane components to the polymer matrix, a durable CHEMFET system is obtained. It is shown that such sensors can be very well incorporated in a continuous flow system, e.g. a Flow Injection Analysis (FIA) system. Finally, the realization of a liquid dosing module and a modular setup for a Micro Total Analysis System (μTAS) is illustrated. Possible applications of such μTAS are discussed, and future markets are indicated.
    Original languageUndefined
    Title of host publicationProceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages181-184
    Number of pages4
    ISBN (Print)0-7803-2095-6
    DOIs
    Publication statusPublished - 2 Oct 1994
    Event1994 5th International Symposium on Micro Machine and Human Science Proceedings - Nagoya, Jpn
    Duration: 2 Oct 19944 Oct 1994

    Conference

    Conference1994 5th International Symposium on Micro Machine and Human Science Proceedings
    Period2/10/944/10/94
    Other2-4 October 1994

    Keywords

    • EWI-14050
    • METIS-114101
    • IR-17206

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