Miniaturized chemical analysis systems

Albert van den Berg; Piet Bergveld; David Reinhoudt; Michael Curt Elwenspoek; J.H.J. Fluitman

doi:10.1109/ISMMHS.1994.512921

Miniaturized chemical analysis systems

Albert van den Berg, Piet Bergveld, David Reinhoudt, Michael Curt Elwenspoek, J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

8 Citations (Scopus)

179 Downloads (Pure)

Abstract

A new concept for miniaturised analysis systems, based on a modular assembly of silicon system components on a anodically bonded base plate containing fluid channels, is presented. The proposed configuration allows the separate development of the different system elements as well as an easy modification of the system setup. Besides micropumps and flow-sensors, for detection, different ISFET-based chemical sensors for cations are presented. Using covalent attachment of all membrane components to the polymer matrix, a durable CHEMFET system is obtained. It is shown that such sensors can be very well incorporated in a continuous flow system, e.g. a Flow Injection Analysis (FIA) system. Finally, the realization of a liquid dosing module and a modular setup for a Micro Total Analysis System (μTAS) is illustrated. Possible applications of such μTAS are discussed, and future markets are indicated.

Original language	Undefined
Title of host publication	Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings
Place of Publication	Piscataway
Publisher	IEEE
Pages	181-184
Number of pages	4
ISBN (Print)	0-7803-2095-6
DOIs	https://doi.org/10.1109/ISMMHS.1994.512921
Publication status	Published - 2 Oct 1994
Event	1994 5th International Symposium on Micro Machine and Human Science Proceedings - Nagoya, Jpn Duration: 2 Oct 1994 → 4 Oct 1994

Conference

Conference	1994 5th International Symposium on Micro Machine and Human Science Proceedings
Period	2/10/94 → 4/10/94
Other	2-4 October 1994

Keywords

EWI-14050
METIS-114101
IR-17206

Access to Document

10.1109/ISMMHS.1994.512921

Cite this

@inproceedings{bcf45d7fbb52491199dd15fb2c8cc50e,

title = "Miniaturized chemical analysis systems",

abstract = "A new concept for miniaturised analysis systems, based on a modular assembly of silicon system components on a anodically bonded base plate containing fluid channels, is presented. The proposed configuration allows the separate development of the different system elements as well as an easy modification of the system setup. Besides micropumps and flow-sensors, for detection, different ISFET-based chemical sensors for cations are presented. Using covalent attachment of all membrane components to the polymer matrix, a durable CHEMFET system is obtained. It is shown that such sensors can be very well incorporated in a continuous flow system, e.g. a Flow Injection Analysis (FIA) system. Finally, the realization of a liquid dosing module and a modular setup for a Micro Total Analysis System (μTAS) is illustrated. Possible applications of such μTAS are discussed, and future markets are indicated.",

keywords = "EWI-14050, METIS-114101, IR-17206",

author = "{van den Berg}, Albert and Piet Bergveld and David Reinhoudt and Elwenspoek, {Michael Curt} and J.H.J. Fluitman",

year = "1994",

month = oct,

day = "2",

doi = "10.1109/ISMMHS.1994.512921",

language = "Undefined",

isbn = "0-7803-2095-6",

pages = "181--184",

booktitle = "Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings",

publisher = "IEEE",

address = "United States",

note = "1994 5th International Symposium on Micro Machine and Human Science Proceedings ; Conference date: 02-10-1994 Through 04-10-1994",

}

van den Berg, A, Bergveld, P, Reinhoudt, D, Elwenspoek, MC & Fluitman, JHJ 1994, Miniaturized chemical analysis systems. in Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings. IEEE, Piscataway, pp. 181-184, 1994 5th International Symposium on Micro Machine and Human Science Proceedings, 2/10/94. https://doi.org/10.1109/ISMMHS.1994.512921

TY - GEN

T1 - Miniaturized chemical analysis systems

AU - van den Berg, Albert

AU - Bergveld, Piet

AU - Reinhoudt, David

AU - Elwenspoek, Michael Curt

AU - Fluitman, J.H.J.

PY - 1994/10/2

Y1 - 1994/10/2

N2 - A new concept for miniaturised analysis systems, based on a modular assembly of silicon system components on a anodically bonded base plate containing fluid channels, is presented. The proposed configuration allows the separate development of the different system elements as well as an easy modification of the system setup. Besides micropumps and flow-sensors, for detection, different ISFET-based chemical sensors for cations are presented. Using covalent attachment of all membrane components to the polymer matrix, a durable CHEMFET system is obtained. It is shown that such sensors can be very well incorporated in a continuous flow system, e.g. a Flow Injection Analysis (FIA) system. Finally, the realization of a liquid dosing module and a modular setup for a Micro Total Analysis System (μTAS) is illustrated. Possible applications of such μTAS are discussed, and future markets are indicated.

AB - A new concept for miniaturised analysis systems, based on a modular assembly of silicon system components on a anodically bonded base plate containing fluid channels, is presented. The proposed configuration allows the separate development of the different system elements as well as an easy modification of the system setup. Besides micropumps and flow-sensors, for detection, different ISFET-based chemical sensors for cations are presented. Using covalent attachment of all membrane components to the polymer matrix, a durable CHEMFET system is obtained. It is shown that such sensors can be very well incorporated in a continuous flow system, e.g. a Flow Injection Analysis (FIA) system. Finally, the realization of a liquid dosing module and a modular setup for a Micro Total Analysis System (μTAS) is illustrated. Possible applications of such μTAS are discussed, and future markets are indicated.

KW - EWI-14050

KW - METIS-114101

KW - IR-17206

U2 - 10.1109/ISMMHS.1994.512921

DO - 10.1109/ISMMHS.1994.512921

M3 - Conference contribution

SN - 0-7803-2095-6

SP - 181

EP - 184

BT - Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings

PB - IEEE

CY - Piscataway

T2 - 1994 5th International Symposium on Micro Machine and Human Science Proceedings

Y2 - 2 October 1994 through 4 October 1994

ER -