Abstract
A calorimetric miniaturized flow sensor was realized with
a linear sensor response measured for DI water flow from
40 nl⋅min-1 up to 300 nl⋅min-1. A versatile technological
concept is used to realize a sensor with thermally-isolated
freely-suspended silicon-nitride microchannels directly
below the substrate surface. The microchannel concept
allows for the planar integration of sensor structures in
close proximity to the fluid. Chemical-resistant fluidic
connections can be made directly on top of the
microchannels, without introducing large dead-volumes.
The realized flow sensor consists of a microchannel with
low hydraulic resistance and small total fluid volume.
Original language | Undefined |
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Title of host publication | Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on |
Place of Publication | Los Alamitos |
Publisher | IEEE Computer Society Press |
Pages | 123-126 |
Number of pages | 4 |
ISBN (Print) | 1-4244-0951-9 |
DOIs | |
Publication status | Published - 2007 |
Event | 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: 21 Jan 2007 → 25 Jan 2007 Conference number: 20 |
Publication series
Name | |
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Publisher | IEEE Computer Society Press |
Number | 7 |
Conference
Conference | 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 |
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Abbreviated title | MEMS |
Country/Territory | Japan |
City | Kobe |
Period | 21/01/07 → 25/01/07 |
Keywords
- EWI-11692
- METIS-245919
- IR-62099