Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels

Marcel Dijkstra; Meint J. de Boer; Johan W. Berenschot; Theodorus S.J. Lammerink; Remco J. Wiegerink; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.2007.4433031

Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels

Marcel Dijkstra, Meint J. de Boer, Johan W. Berenschot, Theodorus S.J. Lammerink, Remco J. Wiegerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

20 Citations (Scopus)

125 Downloads (Pure)

Abstract

A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nl⋅min-1 up to 300 nl⋅min-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.

Original language	Undefined
Title of host publication	Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on
Place of Publication	Los Alamitos
Publisher	IEEE Computer Society Press
Pages	123-126
Number of pages	4
ISBN (Print)	1-4244-0951-9
DOIs	https://doi.org/10.1109/MEMSYS.2007.4433031
Publication status	Published - 2007
Event	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: 21 Jan 2007 → 25 Jan 2007 Conference number: 20

Publication series

Name
Publisher	IEEE Computer Society Press
Number	7

Conference

Conference	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Abbreviated title	MEMS
Country	Japan
City	Kobe
Period	21/01/07 → 25/01/07

Keywords

EWI-11692
METIS-245919
IR-62099

Access to Document

10.1109/MEMSYS.2007.4433031

MDijkstra_MEMS_2007
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MDijkstra_MEMS_2007
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Cite this

Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S. J., Wiegerink, R. J., & Elwenspoek, M. C. (2007). Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on (pp. 123-126). IEEE Computer Society Press. https://doi.org/10.1109/MEMSYS.2007.4433031

Dijkstra, Marcel ; de Boer, Meint J. ; Berenschot, Johan W. ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. ; Elwenspoek, Michael Curt. / Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on. Los Alamitos : IEEE Computer Society Press, 2007. pp. 123-126

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title = "Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels",

abstract = "A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nl⋅min-1 up to 300 nl⋅min-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.",

keywords = "EWI-11692, METIS-245919, IR-62099",

author = "Marcel Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt}",

year = "2007",

doi = "10.1109/MEMSYS.2007.4433031",

language = "Undefined",

isbn = "1-4244-0951-9",

publisher = "IEEE Computer Society Press",

number = "7",

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note = "null ; Conference date: 21-01-2007 Through 25-01-2007",

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Dijkstra, M, de Boer, MJ, Berenschot, JW , Lammerink, TSJ , Wiegerink, RJ & Elwenspoek, MC 2007, Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. in Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on. IEEE Computer Society Press, Los Alamitos, pp. 123-126, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, 21/01/07. https://doi.org/10.1109/MEMSYS.2007.4433031

Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. / Dijkstra, Marcel; de Boer, Meint J.; Berenschot, Johan W.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; Elwenspoek, Michael Curt.

Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on. Los Alamitos : IEEE Computer Society Press, 2007. p. 123-126.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels

AU - Dijkstra, Marcel

AU - de Boer, Meint J.

AU - Berenschot, Johan W.

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AU - Wiegerink, Remco J.

AU - Elwenspoek, Michael Curt

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N2 - A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nl⋅min-1 up to 300 nl⋅min-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.

AB - A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nl⋅min-1 up to 300 nl⋅min-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.

KW - EWI-11692

KW - METIS-245919

KW - IR-62099

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DO - 10.1109/MEMSYS.2007.4433031

M3 - Conference contribution

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BT - Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on

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Y2 - 21 January 2007 through 25 January 2007

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Dijkstra M, de Boer MJ, Berenschot JW , Lammerink TSJ , Wiegerink RJ, Elwenspoek MC. Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on. Los Alamitos: IEEE Computer Society Press. 2007. p. 123-126 https://doi.org/10.1109/MEMSYS.2007.4433031