Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels

Marcel Dijkstra, Meint J. de Boer, Johan W. Berenschot, Theodorus S.J. Lammerink, Remco J. Wiegerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    20 Citations (Scopus)
    176 Downloads (Pure)


    A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nl⋅min-1 up to 300 nl⋅min-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.
    Original languageUndefined
    Title of host publicationMicro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society Press
    Number of pages4
    ISBN (Print)1-4244-0951-9
    Publication statusPublished - 2007
    Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
    Duration: 21 Jan 200725 Jan 2007
    Conference number: 20

    Publication series

    PublisherIEEE Computer Society Press


    Conference20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
    Abbreviated titleMEMS


    • EWI-11692
    • METIS-245919
    • IR-62099

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