MME 2010, 21st Micromechanics and Micro systems Europe Workshop: Abstracts

Leon Abelmann; Hans Groenland; Joost van Honschoten; Hein Verputten

MME 2010, 21st Micromechanics and Micro systems Europe Workshop: Abstracts

Leon Abelmann (Editor)
, Hans Groenland (Editor)
, Joost van Honschoten (Editor)
, Hein Verputten (Editor)

Research output: Book/Report › Book editing › Academic

794 Downloads (Pure)

Abstract

The MME workshop is a well established and recognized European event in the field of Micromachining, Microengineering and Technology for the realization of micro-sensors and -actuators. At the MME workshop scientists and people from industry interested in the field gather annually. The goals are stimulation and improvement of know-how in the field, as well as the establishment of cooperation and friendship between all delegates. Thus MME is arranged so that people can meet in a friendly and informal atmosphere. Therefore the accent lies on mutual discussions around poster presentations rather than on formal oral presentations.

Original language	English
Place of Publication	Enschede, The Netherlands
Publisher	University of Twente, Transducers Science and Technology
Number of pages	326
ISBN (Print)	978-90-816737-1-6
Publication status	Published - Sept 2010

Keywords

TST-SMI: Formerly in EWI-SMI
TST-uSPAM: micro Scanning Probe Array Memory

Access to Document

BookFinal published version, 23.8 MB

A Musical instrument in MEMS
Engelen, J. B. C., de Boer, H., Beekman, J. G., Been, A. J., Folkertsma, G. A., Fortgens, L. C., de Graaf, D. B., Vocke, S., Woldering, L. A., Abelmann, L. & Elwenspoek, M. C., Sept 2010, 21st Micromechanics and Micro systems Europe workshop, MME 2010: Abstracts. Abelmann, L., Groenland, H., van Honschoten, J. & Verputten, H. (eds.). Enschede: University of Twente - Transducers Science and Technology (TST), p. 193-196 4 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Open Access
File
Determination of young's modulus of PZT-influence of cantilever orientation
Nazeer, H., Woldering, L. A., Abelmann, L. & Elwenspoek, M. C., Sept 2010, 21st Micromechanics and Micro systems Europe workshop (MME 2010): Abstracts. Enschede: University of Twente - Transducers Science and Technology (TST), p. 257-260 4 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access
File
Fabrication of cantilever arrays with tips for parallel optical readout
Koelmans, W. W., Peters, T., Abelmann, L. & Elwenspoek, M. C., Sept 2010, 21st Micromechanics and Micro systems Europe workshop (MME 2010): Abstracts. Enschede, The Netherlands: University of Twente - Transducers Science and Technology (TST), p. 277-280 4 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access
File

Cite this

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title = "MME 2010, 21st Micromechanics and Micro systems Europe Workshop: Abstracts",

abstract = "The MME workshop is a well established and recognized European event in the field of Micromachining, Microengineering and Technology for the realization of micro-sensors and -actuators. At the MME workshop scientists and people from industry interested in the field gather annually. The goals are stimulation and improvement of know-how in the field, as well as the establishment of cooperation and friendship between all delegates. Thus MME is arranged so that people can meet in a friendly and informal atmosphere. Therefore the accent lies on mutual discussions around poster presentations rather than on formal oral presentations.",

keywords = "TST-SMI: Formerly in EWI-SMI, TST-uSPAM: micro Scanning Probe Array Memory",

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A2 - Verputten, Hein

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N2 - The MME workshop is a well established and recognized European event in the field of Micromachining, Microengineering and Technology for the realization of micro-sensors and -actuators. At the MME workshop scientists and people from industry interested in the field gather annually. The goals are stimulation and improvement of know-how in the field, as well as the establishment of cooperation and friendship between all delegates. Thus MME is arranged so that people can meet in a friendly and informal atmosphere. Therefore the accent lies on mutual discussions around poster presentations rather than on formal oral presentations.

AB - The MME workshop is a well established and recognized European event in the field of Micromachining, Microengineering and Technology for the realization of micro-sensors and -actuators. At the MME workshop scientists and people from industry interested in the field gather annually. The goals are stimulation and improvement of know-how in the field, as well as the establishment of cooperation and friendship between all delegates. Thus MME is arranged so that people can meet in a friendly and informal atmosphere. Therefore the accent lies on mutual discussions around poster presentations rather than on formal oral presentations.

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KW - TST-uSPAM: micro Scanning Probe Array Memory

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PB - University of Twente, Transducers Science and Technology

CY - Enschede, The Netherlands

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MME 2010, 21st Micromechanics and Micro systems Europe Workshop: Abstracts

Abstract

Keywords

Access to Document

Fingerprint

Research output

A Musical instrument in MEMS

Determination of young's modulus of PZT-influence of cantilever orientation

Fabrication of cantilever arrays with tips for parallel optical readout

Cite this