M.O. multilayer sputter-gun system

W.P. van Drent, J.C. Lodder, U. Enz, T.J.A. Popma

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 11 May 1992

    Keywords

    • METIS-117715

    Cite this

    van Drent, W. P., Lodder, J. C., Enz, U., & Popma, T. J. A. (1992). M.O. multilayer sputter-gun system. -.
    van Drent, W.P. ; Lodder, J.C. ; Enz, U. ; Popma, T.J.A. / M.O. multilayer sputter-gun system.
    @conference{02b740300db9441b9acd0f17f0ea305a,
    title = "M.O. multilayer sputter-gun system",
    keywords = "METIS-117715",
    author = "{van Drent}, W.P. and J.C. Lodder and U. Enz and T.J.A. Popma",
    year = "1992",
    month = "5",
    day = "11",
    language = "Undefined",
    pages = "--",

    }

    van Drent, WP, Lodder, JC, Enz, U & Popma, TJA 1992, 'M.O. multilayer sputter-gun system' pp. -.

    M.O. multilayer sputter-gun system. / van Drent, W.P.; Lodder, J.C.; Enz, U.; Popma, T.J.A.

    1992. -.

    Research output: Contribution to conferencePosterOther research output

    TY - CONF

    T1 - M.O. multilayer sputter-gun system

    AU - van Drent, W.P.

    AU - Lodder, J.C.

    AU - Enz, U.

    AU - Popma, T.J.A.

    PY - 1992/5/11

    Y1 - 1992/5/11

    KW - METIS-117715

    M3 - Poster

    SP - -

    ER -

    van Drent WP, Lodder JC, Enz U, Popma TJA. M.O. multilayer sputter-gun system. 1992.