M.O. multilayer sputter-gun system

W.P. van Drent, J.C. Lodder, U. Enz, T.J.A. Popma

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 11 May 1992
Event	Wetenschappelijke Vergadering FOM-Werkgemeenschap Materialen 1992 - Veldhoven, Netherlands Duration: 11 May 1992 → 12 May 1992

Conference	Wetenschappelijke Vergadering FOM-Werkgemeenschap Materialen 1992
Country/Territory	Netherlands
City	Veldhoven
Period	11/05/92 → 12/05/92

Cite this

@conference{02b740300db9441b9acd0f17f0ea305a,

title = "M.O. multilayer sputter-gun system",

author = "\{van Drent\}, W.P. and J.C. Lodder and U. Enz and T.J.A. Popma",

year = "1992",

month = may,

day = "11",

language = "English",

note = "Wetenschappelijke Vergadering FOM-Werkgemeenschap Materialen 1992 ; Conference date: 11-05-1992 Through 12-05-1992",

}