MOCVD grown Pb(ZrTi)O3 thin films for applications in micromechanics and integrated optics: initial results

E. Haverkamp, W. van Sark, P. Larsen, Johannes G.E. Gardeniers, M. Hoekman, Remco G.P. Sanders, Paul Lambeck, H.J. van der Linden

    Research output: Other contributionOther research output

    Original languageEnglish
    Place of PublicationNijmegen
    Publication statusPublished - 26 May 1999


    • METIS-114680

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