MOCVD grown Pb(ZrTi)O3 thin films for applications in micromechanics and integrated optical - initial results -

M.P. Moret, S.A. Rossinger, H.J. van der Linden, E. Haverkamp, W.G.J.H.M. van Sark, P.K. Larsen, J.G.E. Gardeniers, M. Hoekman, R.G.P. Sanders, P.V. Lambeck

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Publication statusPublished - 12 Jul 1999
    Event9th European Meeting on Ferroelectricity, EMF 1999 - Prague, Czech Republic
    Duration: 12 Jul 199916 Jul 1999
    Conference number: 9

    Conference

    Conference9th European Meeting on Ferroelectricity, EMF 1999
    Abbreviated titleEMF 1999
    CountryCzech Republic
    CityPrague
    Period12/07/9916/07/99

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