MOCVD grown Pb(ZrTi)O3 thin films for applications in micromechanics and integrated optics: initial results

E. Haverkamp; W. van Sark; P. Larsen; Johannes G.E. Gardeniers; M. Hoekman; Remco G.P. Sanders; Paul Lambeck; H.J. van der Linden

MOCVD grown Pb(ZrTi)O3 thin films for applications in micromechanics and integrated optics: initial results

E. Haverkamp
, W. van Sark
, P. Larsen
, Johannes G.E. Gardeniers
, M. Hoekman
, Remco G.P. Sanders
, Paul Lambeck
, H.J. van der Linden

Research output: Other contribution › Other research output

Original language	English
Place of Publication	Nijmegen
Publication status	Published - 26 May 1999

Keywords

METIS-114680

Cite this

@misc{43e1aa2217dc4b6d8641c1cd6b72cc1d,

title = "MOCVD grown Pb(ZrTi)O3 thin films for applications in micromechanics and integrated optics: initial results",

keywords = "METIS-114680",

author = "E. Haverkamp and \{van Sark\}, W. and P. Larsen and Gardeniers, \{Johannes G.E.\} and M. Hoekman and Sanders, \{Remco G.P.\} and Paul Lambeck and \{van der Linden\}, H.J.",

year = "1999",

month = may,

day = "26",

language = "English",

type = "Other",

}

TY - GEN

T1 - MOCVD grown Pb(ZrTi)O3 thin films for applications in micromechanics and integrated optics: initial results

AU - Haverkamp, E.

AU - van Sark, W.

AU - Larsen, P.

AU - Gardeniers, Johannes G.E.

AU - Hoekman, M.

AU - Sanders, Remco G.P.

AU - Lambeck, Paul

AU - van der Linden, H.J.

PY - 1999/5/26

Y1 - 1999/5/26

KW - METIS-114680

M3 - Other contribution

CY - Nijmegen

ER -