Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor

M. Stranczl, Edin Sarajlic, Gijsbertus J.M. Krijnen, H. Fujita, M.A.M. Gijs, C. Yamahata

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    9 Citations (Scopus)
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    We present the design, modeling and characterization of a 3-phase electrostatic rotary stepper micromotor. The proposed motor is a monolithic device fabricated using silicon-on-insulator (SOI) technology. The rotor is suspended with a frictionless flexural pivot bearing and reaches an unprecedented rotational range of 30° (+/- 15°) at 65 V. We have established a mechanical model of the deformation structure and performed finite element analysis (FEA) simulations of the dynamic properties. These studies are consistent with the extensive experimental characterization performed in the quasi-static, transient, and dynamic regimes.
    Original languageUndefined
    Title of host publicationProceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems
    Place of PublicationUSA
    Number of pages4
    ISBN (Print)978-1-4244-9633-4
    Publication statusPublished - 23 Jan 2011
    Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
    Duration: 23 Jan 201127 Jan 2011
    Conference number: 24

    Publication series

    PublisherIEEE Micro Electro Mechanical Systems


    Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
    Abbreviated titleMEMS


    • METIS-277526
    • EWI-19563
    • IR-75917

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